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• W2976577575 endingPage "106674" @default.
• W2976577575 startingPage "106674" @default.
• W2976577575 abstract "Helium (He) low temperature plasma with an electron density higher than 1011cm−3 was produced using an inductively coupled plasma source, and the electron density of this plasma was determined using a high-resolution laser spectroscopic technique. To remove the Doppler broadening which is the most dominant line broadening in low temperature plasmas, a saturated absorption spectroscopy system was configured. The Lamb dip was successfully separated from the Doppler broadening for the 21S−41P transition of the He plasma using a high-resolution laser beam with a narrow spectral line width (below 1 MHz) at 396.5 nm. The estimated spectral line widths of natural broadening, van der Waals broadening, resonance broadening, and Stark broadening were 40.14 MHz, 0.93 MHz, 0.15 MHz, and 12.60 MHz, respectively, when the He gas pressure was 30 mTorr and 1 kW RF power was applied. The electron density of the He plasmas was determined to be ∼3×1011cm−3, which was comparable with those determined by a Langmuir probe and optical emission spectroscopy combined with a collisional-radiative model." @default.
• W2976577575 created "2019-10-03" @default.
• W2976577575 creator A5018901969 @default.
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• W2976577575 date "2019-12-01" @default.
• W2976577575 modified "2023-09-23" @default.
• W2976577575 title "Laser diagnostics for the electron density of helium low temperature plasmas using saturated absorption spectroscopy" @default.
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• W2976577575 doi "https://doi.org/10.1016/j.jqsrt.2019.106674" @default.
• W2976577575 hasPublicationYear "2019" @default.
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