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• W2976704620 abstract "Methylsilane-derived fragment ions obtained from a Bernas-type ion source were investigated using a low-energy mass-selected ion beam system. Based on mass-energy analyzer measurements, these ions were determined to be H+, H2+, H3+, CH3+, Si+, and SiCH5+. The SiCH5+ ions were selected and injected into a Si(111) substrate at 750 °C. The ion energy was 40 eV. This injection led to the formation of a silicon carbide film on the Si substrate. An analysis of this film indicates that this type of ion beam deposition method can efficiently form silicon carbide film." @default.
• W2976704620 created "2019-10-03" @default.
• W2976704620 creator A5012033210 @default.
• W2976704620 creator A5037328536 @default.
• W2976704620 creator A5041275701 @default.
• W2976704620 creator A5078213650 @default.
• W2976704620 creator A5082564878 @default.
• W2976704620 date "2019-09-01" @default.
• W2976704620 modified "2023-09-27" @default.
• W2976704620 title "Low-energy mass-selected ion beam deposition of silicon carbide with Bernas-type ion source using methylsilane" @default.
• W2976704620 cites W1506296867 @default.
• W2976704620 cites W1862220836 @default.
• W2976704620 cites W1967830737 @default.
• W2976704620 cites W1968136740 @default.
• W2976704620 cites W1969387134 @default.
• W2976704620 cites W1969713615 @default.
• W2976704620 cites W1979551973 @default.
• W2976704620 cites W1987917505 @default.
• W2976704620 cites W1998167243 @default.
• W2976704620 cites W2000194296 @default.
• W2976704620 cites W2005593486 @default.
• W2976704620 cites W2007150458 @default.
• W2976704620 cites W2019378201 @default.
• W2976704620 cites W2024478762 @default.
• W2976704620 cites W2032037063 @default.
• W2976704620 cites W2034474059 @default.
• W2976704620 cites W2037910193 @default.
• W2976704620 cites W2046215002 @default.
• W2976704620 cites W2054200750 @default.
• W2976704620 cites W2065530777 @default.
• W2976704620 cites W2067467858 @default.
• W2976704620 cites W2074780295 @default.
• W2976704620 cites W2077336580 @default.
• W2976704620 cites W2081058710 @default.
• W2976704620 cites W2082816250 @default.
• W2976704620 cites W2090074780 @default.
• W2976704620 cites W2093326325 @default.
• W2976704620 cites W2129464726 @default.
• W2976704620 cites W2294309947 @default.
• W2976704620 cites W2796157528 @default.
• W2976704620 cites W2912735640 @default.
• W2976704620 cites W4234705718 @default.
• W2976704620 doi "https://doi.org/10.1063/1.5116614" @default.
• W2976704620 hasPublicationYear "2019" @default.
• W2976704620 type Work @default.
• W2976704620 sameAs 2976704620 @default.
• W2976704620 citedByCount "9" @default.
• W2976704620 countsByYear W29767046202020 @default.
• W2976704620 countsByYear W29767046202021 @default.
• W2976704620 countsByYear W29767046202022 @default.
• W2976704620 countsByYear W29767046202023 @default.
• W2976704620 crossrefType "journal-article" @default.
• W2976704620 hasAuthorship W2976704620A5012033210 @default.
• W2976704620 hasAuthorship W2976704620A5037328536 @default.
• W2976704620 hasAuthorship W2976704620A5041275701 @default.
• W2976704620 hasAuthorship W2976704620A5078213650 @default.
• W2976704620 hasAuthorship W2976704620A5082564878 @default.
• W2976704620 hasBestOaLocation W29767046201 @default.
• W2976704620 hasConcept C111368507 @default.
• W2976704620 hasConcept C113196181 @default.
• W2976704620 hasConcept C121332964 @default.
• W2976704620 hasConcept C127313418 @default.
• W2976704620 hasConcept C145148216 @default.
• W2976704620 hasConcept C151730666 @default.
• W2976704620 hasConcept C178790620 @default.
• W2976704620 hasConcept C184779094 @default.
• W2976704620 hasConcept C185592680 @default.
• W2976704620 hasConcept C188224857 @default.
• W2976704620 hasConcept C191897082 @default.
• W2976704620 hasConcept C192562407 @default.
• W2976704620 hasConcept C2777289219 @default.
• W2976704620 hasConcept C2780722187 @default.
• W2976704620 hasConcept C2781463530 @default.
• W2976704620 hasConcept C2816523 @default.
• W2976704620 hasConcept C40325409 @default.
• W2976704620 hasConcept C49040817 @default.
• W2976704620 hasConcept C50774322 @default.
• W2976704620 hasConcept C544956773 @default.
• W2976704620 hasConcept C64297162 @default.
• W2976704620 hasConcept C77671233 @default.
• W2976704620 hasConcept C79176676 @default.
• W2976704620 hasConcept C86803240 @default.
• W2976704620 hasConcept C93106096 @default.
• W2976704620 hasConceptScore W2976704620C111368507 @default.
• W2976704620 hasConceptScore W2976704620C113196181 @default.
• W2976704620 hasConceptScore W2976704620C121332964 @default.
• W2976704620 hasConceptScore W2976704620C127313418 @default.
• W2976704620 hasConceptScore W2976704620C145148216 @default.
• W2976704620 hasConceptScore W2976704620C151730666 @default.
• W2976704620 hasConceptScore W2976704620C178790620 @default.
• W2976704620 hasConceptScore W2976704620C184779094 @default.
• W2976704620 hasConceptScore W2976704620C185592680 @default.
• W2976704620 hasConceptScore W2976704620C188224857 @default.
• W2976704620 hasConceptScore W2976704620C191897082 @default.
• W2976704620 hasConceptScore W2976704620C192562407 @default.
• W2976704620 hasConceptScore W2976704620C2777289219 @default.
• W2976704620 hasConceptScore W2976704620C2780722187 @default.
• W2976704620 hasConceptScore W2976704620C2781463530 @default.
• W2976704620 hasConceptScore W2976704620C2816523 @default.
• W2976704620 hasConceptScore W2976704620C40325409 @default.

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