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- W2978057091 abstract "The Silicon-silicon Direct Bonding(SDB)technology has been widely used in SOI,MEMS and electronics. In the technique,the quality of a polished silicon wafer substrate exerts an important impact on both bonding effect and device performance. Consisting of dimensional accuracy and surface quality,the substrate quality will determine the bonding effect through influencing the interfacial stress or introducing interfacial cavities." @default.
- W2978057091 created "2019-10-10" @default.
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- W2978057091 date "2014-01-01" @default.
- W2978057091 modified "2023-09-23" @default.
- W2978057091 title "Influence of Silicon Wafer Quality on SDB Technology" @default.
- W2978057091 hasPublicationYear "2014" @default.
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