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- W2979251011 abstract "Aluminum step is the important target part used in laser driving shockwave experiment. In this paper,the aluminum step was produced by diamond turning technology. The surface roughness is characterized by means of Vecco NT1100 device and the thickness is measured by chromatic confocal spectral device.The results indicate that the error of thickness of aluminum step is less than 1 μm,the maximum thickness and the minimum thickness is less than 0. 1 μm,thickness uniformity more than 99. 5% and the measurement uncertainty is about 57 nm. the surface roughness of aluminum step is less than 10 nm." @default.
- W2979251011 created "2019-10-10" @default.
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- W2979251011 date "2013-01-01" @default.
- W2979251011 modified "2023-09-26" @default.
- W2979251011 title "Fabrication and measurement of aluminium step used in laser driving shockwave experiment" @default.
- W2979251011 hasPublicationYear "2013" @default.
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