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• W2980060769 endingPage "4450" @default.
• W2980060769 startingPage "4450" @default.
• W2980060769 abstract "This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched piezoelectric structure, a silicon passive layer, and a silicon substrate with a cavity. Two types of parameters are simulated with periodic boundary conditions: (1) the resonant frequencies and mode shapes of PMUT, and (2) the electrical impedance and acoustic field of PMUT loaded with air and water. The resonant frequencies and mode shapes of an electrically connected PMUT array are obtained with a laser Doppler vibrometer (LDV). The first resonant frequency difference between 3D FEM simulation and the measurement for a 16-MHz PMUT is reasonably within 6%, which is just one-third of that between the analytical method and the measurement. The electrical impedance of the PMUT array measured in air and water is consistent with the simulation results. The 3D model is suitable for predicting electrical and acoustic performance and, thus, optimizing the structure of high-frequency PMUTs. It also has good potential to analyze the transmission and reception performances of a PMUT array for future compact ultrasonic systems." @default.
• W2980060769 created "2019-10-18" @default.
• W2980060769 creator A5016448886 @default.
• W2980060769 creator A5020046309 @default.
• W2980060769 creator A5020937326 @default.
• W2980060769 creator A5021843309 @default.
• W2980060769 creator A5022664507 @default.
• W2980060769 creator A5024738909 @default.
• W2980060769 creator A5026034335 @default.
• W2980060769 creator A5051655466 @default.
• W2980060769 creator A5059523776 @default.
• W2980060769 creator A5061281168 @default.
• W2980060769 creator A5071226886 @default.
• W2980060769 creator A5086020508 @default.
• W2980060769 date "2019-10-14" @default.
• W2980060769 modified "2023-10-17" @default.
• W2980060769 title "3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI" @default.
• W2980060769 cites W1481967161 @default.
• W2980060769 cites W1501841716 @default.
• W2980060769 cites W1825942968 @default.
• W2980060769 cites W1987548789 @default.
• W2980060769 cites W2012779095 @default.
• W2980060769 cites W2013191230 @default.
• W2980060769 cites W2017361657 @default.
• W2980060769 cites W2071879226 @default.
• W2980060769 cites W2087921477 @default.
• W2980060769 cites W2124726994 @default.
• W2980060769 cites W2136756132 @default.
• W2980060769 cites W2144208546 @default.
• W2980060769 cites W2145602502 @default.
• W2980060769 cites W2153087427 @default.
• W2980060769 cites W2157763436 @default.
• W2980060769 cites W2165789467 @default.
• W2980060769 cites W2408614914 @default.
• W2980060769 cites W2505965987 @default.
• W2980060769 cites W2615710859 @default.
• W2980060769 cites W2615758187 @default.
• W2980060769 cites W2767233649 @default.
• W2980060769 cites W2790269177 @default.
• W2980060769 cites W597899981 @default.
• W2980060769 doi "https://doi.org/10.3390/s19204450" @default.
• W2980060769 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6832214" @default.
• W2980060769 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/31615076" @default.
• W2980060769 hasPublicationYear "2019" @default.
• W2980060769 type Work @default.
• W2980060769 sameAs 2980060769 @default.
• W2980060769 citedByCount "22" @default.
• W2980060769 countsByYear W29800607692020 @default.
• W2980060769 countsByYear W29800607692021 @default.
• W2980060769 countsByYear W29800607692022 @default.
• W2980060769 countsByYear W29800607692023 @default.
• W2980060769 crossrefType "journal-article" @default.
• W2980060769 hasAuthorship W2980060769A5016448886 @default.
• W2980060769 hasAuthorship W2980060769A5020046309 @default.
• W2980060769 hasAuthorship W2980060769A5020937326 @default.
• W2980060769 hasAuthorship W2980060769A5021843309 @default.
• W2980060769 hasAuthorship W2980060769A5022664507 @default.
• W2980060769 hasAuthorship W2980060769A5024738909 @default.
• W2980060769 hasAuthorship W2980060769A5026034335 @default.
• W2980060769 hasAuthorship W2980060769A5051655466 @default.
• W2980060769 hasAuthorship W2980060769A5059523776 @default.
• W2980060769 hasAuthorship W2980060769A5061281168 @default.
• W2980060769 hasAuthorship W2980060769A5071226886 @default.
• W2980060769 hasAuthorship W2980060769A5086020508 @default.
• W2980060769 hasBestOaLocation W29800607691 @default.
• W2980060769 hasConcept C100082104 @default.
• W2980060769 hasConcept C121332964 @default.
• W2980060769 hasConcept C127413603 @default.
• W2980060769 hasConcept C135628077 @default.
• W2980060769 hasConcept C192562407 @default.
• W2980060769 hasConcept C24326235 @default.
• W2980060769 hasConcept C24890656 @default.
• W2980060769 hasConcept C57693265 @default.
• W2980060769 hasConcept C58772458 @default.
• W2980060769 hasConcept C66938386 @default.
• W2980060769 hasConcept C81288441 @default.
• W2980060769 hasConcept C86194701 @default.
• W2980060769 hasConceptScore W2980060769C100082104 @default.
• W2980060769 hasConceptScore W2980060769C121332964 @default.
• W2980060769 hasConceptScore W2980060769C127413603 @default.
• W2980060769 hasConceptScore W2980060769C135628077 @default.
• W2980060769 hasConceptScore W2980060769C192562407 @default.
• W2980060769 hasConceptScore W2980060769C24326235 @default.
• W2980060769 hasConceptScore W2980060769C24890656 @default.
• W2980060769 hasConceptScore W2980060769C57693265 @default.
• W2980060769 hasConceptScore W2980060769C58772458 @default.
• W2980060769 hasConceptScore W2980060769C66938386 @default.
• W2980060769 hasConceptScore W2980060769C81288441 @default.
• W2980060769 hasConceptScore W2980060769C86194701 @default.
• W2980060769 hasFunder F4320335595 @default.
• W2980060769 hasIssue "20" @default.
• W2980060769 hasLocation W29800607691 @default.
• W2980060769 hasLocation W298006076910 @default.
• W2980060769 hasLocation W29800607692 @default.
• W2980060769 hasLocation W29800607693 @default.
• W2980060769 hasLocation W29800607694 @default.
• W2980060769 hasLocation W29800607695 @default.
• W2980060769 hasLocation W29800607696 @default.

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