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- W2980409046 abstract "Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures." @default.
- W2980409046 created "2019-10-25" @default.
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- W2980409046 date "2019-06-01" @default.
- W2980409046 modified "2023-09-24" @default.
- W2980409046 title "Low-Cost Fabrication of Polymer Based Micro-Optical Devices for Application in Illumination, Sensing, and Optical Interconnects" @default.
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- W2980409046 doi "https://doi.org/10.1109/cleoe-eqec.2019.8871721" @default.
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