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- W2980931025 abstract "In this study, we combine low-energy ion scattering (LEIS) static and sputter depth profiles for characterization of the oxidation kinetics on Zr, Mo, Ru, and Ta films of various thicknesses, followed by exposure to atomic oxygen at room temperature (∼20 °C). A method for nondestructive determination of the oxide growth rate via LEIS static depth profiling (static DP) is presented in detail. This method shows high sensitivity to the oxide thickness formed, and the results are in agreement with those obtained by X-ray reflectometry and sputter depth profiling (sputter DP). Sequential exposures of oxygen isotopes in combination with LEIS sputter DP are applied to elucidate the growth mechanism of the oxide films. The results indicate that the oxidation kinetics at the applied experimental conditions is directly influenced by the metal work function, characterizing a Cabrera-Mott growth type. The maximum thickness of the formed oxide and oxide growth rate are in the order Zr ≈ Ta > Mo > Ru. The combining of analysis by LEIS static DP and isotope tracing sputter DP is decisive in the characterization of oxidation kinetics in the room temperature regime." @default.
- W2980931025 created "2019-10-25" @default.
- W2980931025 creator A5045180647 @default.
- W2980931025 creator A5054322139 @default.
- W2980931025 creator A5087582416 @default.
- W2980931025 date "2019-10-15" @default.
- W2980931025 modified "2023-09-23" @default.
- W2980931025 title "Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study" @default.
- W2980931025 cites W1919960290 @default.
- W2980931025 cites W1967885359 @default.
- W2980931025 cites W1969723300 @default.
- W2980931025 cites W1971957419 @default.
- W2980931025 cites W1981832831 @default.
- W2980931025 cites W1987747910 @default.
- W2980931025 cites W1989906370 @default.
- W2980931025 cites W2000692391 @default.
- W2980931025 cites W2006880698 @default.
- W2980931025 cites W2007287349 @default.
- W2980931025 cites W2009476753 @default.
- W2980931025 cites W2009960867 @default.
- W2980931025 cites W2012695793 @default.
- W2980931025 cites W2014739930 @default.
- W2980931025 cites W2023679097 @default.
- W2980931025 cites W2029494261 @default.
- W2980931025 cites W2031635536 @default.
- W2980931025 cites W2064381764 @default.
- W2980931025 cites W2068514139 @default.
- W2980931025 cites W2076971752 @default.
- W2980931025 cites W2078921429 @default.
- W2980931025 cites W2082409034 @default.
- W2980931025 cites W2086948404 @default.
- W2980931025 cites W2088501162 @default.
- W2980931025 cites W2093660458 @default.
- W2980931025 cites W2094832179 @default.
- W2980931025 cites W2096946885 @default.
- W2980931025 cites W2109093133 @default.
- W2980931025 cites W2114115984 @default.
- W2980931025 cites W2142534307 @default.
- W2980931025 cites W2147671357 @default.
- W2980931025 cites W2155312981 @default.
- W2980931025 cites W2292567879 @default.
- W2980931025 cites W2328732047 @default.
- W2980931025 cites W2333340199 @default.
- W2980931025 cites W2462704435 @default.
- W2980931025 cites W2559739196 @default.
- W2980931025 cites W2571306029 @default.
- W2980931025 cites W2596331618 @default.
- W2980931025 cites W2603127374 @default.
- W2980931025 cites W2747611036 @default.
- W2980931025 cites W2781864300 @default.
- W2980931025 cites W2782268081 @default.
- W2980931025 cites W2790910454 @default.
- W2980931025 cites W2810623506 @default.
- W2980931025 doi "https://doi.org/10.1063/1.5115112" @default.
- W2980931025 hasPublicationYear "2019" @default.
- W2980931025 type Work @default.
- W2980931025 sameAs 2980931025 @default.
- W2980931025 citedByCount "11" @default.
- W2980931025 countsByYear W29809310252020 @default.
- W2980931025 countsByYear W29809310252021 @default.
- W2980931025 countsByYear W29809310252022 @default.
- W2980931025 countsByYear W29809310252023 @default.
- W2980931025 crossrefType "journal-article" @default.
- W2980931025 hasAuthorship W2980931025A5045180647 @default.
- W2980931025 hasAuthorship W2980931025A5054322139 @default.
- W2980931025 hasAuthorship W2980931025A5087582416 @default.
- W2980931025 hasBestOaLocation W29809310252 @default.
- W2980931025 hasConcept C113196181 @default.
- W2980931025 hasConcept C121332964 @default.
- W2980931025 hasConcept C145148216 @default.
- W2980931025 hasConcept C148898269 @default.
- W2980931025 hasConcept C171250308 @default.
- W2980931025 hasConcept C178790620 @default.
- W2980931025 hasConcept C179104552 @default.
- W2980931025 hasConcept C185592680 @default.
- W2980931025 hasConcept C19067145 @default.
- W2980931025 hasConcept C191897082 @default.
- W2980931025 hasConcept C192562407 @default.
- W2980931025 hasConcept C22423302 @default.
- W2980931025 hasConcept C2777174998 @default.
- W2980931025 hasConcept C2779851234 @default.
- W2980931025 hasConcept C43617362 @default.
- W2980931025 hasConcept C540031477 @default.
- W2980931025 hasConcept C544153396 @default.
- W2980931025 hasConcept C61427134 @default.
- W2980931025 hasConcept C62520636 @default.
- W2980931025 hasConceptScore W2980931025C113196181 @default.
- W2980931025 hasConceptScore W2980931025C121332964 @default.
- W2980931025 hasConceptScore W2980931025C145148216 @default.
- W2980931025 hasConceptScore W2980931025C148898269 @default.
- W2980931025 hasConceptScore W2980931025C171250308 @default.
- W2980931025 hasConceptScore W2980931025C178790620 @default.
- W2980931025 hasConceptScore W2980931025C179104552 @default.
- W2980931025 hasConceptScore W2980931025C185592680 @default.
- W2980931025 hasConceptScore W2980931025C19067145 @default.
- W2980931025 hasConceptScore W2980931025C191897082 @default.
- W2980931025 hasConceptScore W2980931025C192562407 @default.
- W2980931025 hasConceptScore W2980931025C22423302 @default.
- W2980931025 hasConceptScore W2980931025C2777174998 @default.
- W2980931025 hasConceptScore W2980931025C2779851234 @default.