FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2981917119> ?p ?o ?g. }

• W2981917119 endingPage "128101" @default.
• W2981917119 startingPage "128101" @default.
• W2981917119 abstract "NH 3 -plasma treatment is used to improve the quality of the gate dielectric and interface. Al 2 O 3 is adopted as a buffer layer between HfO 2 and MoS 2 to decrease the interface-state density. Four groups of MOS capacitors and back-gate transistors with different gate dielectrics are fabricated and their C – V and I – V characteristics are compared. It is found that the Al 2 O 3 /HfO 2 back-gate transistor with NH 3 -plasma treatment shows the best electrical performance: high on–off current ratio of 1.53 × 10 7 , higher field-effect mobility of 26.51 cm 2 /V·s, and lower subthreshold swing of 145 mV/dec. These are attributed to the improvements of the gate dielectric and interface qualities by the NH 3 -plasma treatment and the addition of Al 2 O 3 as a buffer layer." @default.
• W2981917119 created "2019-11-01" @default.
• W2981917119 creator A5019918915 @default.
• W2981917119 creator A5044914665 @default.
• W2981917119 creator A5074078628 @default.
• W2981917119 creator A5035415582 @default.
• W2981917119 date "2019-12-01" @default.
• W2981917119 modified "2023-09-26" @default.
• W2981917119 title "Improved performance of back-gate MoS₂ transistors by NH₃-plasma treating high-k gate dielectrics*" @default.
• W2981917119 cites W1530845907 @default.
• W2981917119 cites W1969314684 @default.
• W2981917119 cites W1972523103 @default.
• W2981917119 cites W1975628705 @default.
• W2981917119 cites W1978905540 @default.
• W2981917119 cites W1993916317 @default.
• W2981917119 cites W2009094472 @default.
• W2981917119 cites W2010831213 @default.
• W2981917119 cites W2021994802 @default.
• W2981917119 cites W2024047916 @default.
• W2981917119 cites W2028388855 @default.
• W2981917119 cites W2031851331 @default.
• W2981917119 cites W2066083252 @default.
• W2981917119 cites W2075471044 @default.
• W2981917119 cites W2094618339 @default.
• W2981917119 cites W2094817276 @default.
• W2981917119 cites W2099168730 @default.
• W2981917119 cites W2112787360 @default.
• W2981917119 cites W2117562986 @default.
• W2981917119 cites W2135933491 @default.
• W2981917119 cites W2147662109 @default.
• W2981917119 cites W2147923514 @default.
• W2981917119 cites W2159078685 @default.
• W2981917119 cites W2163433444 @default.
• W2981917119 cites W2326584007 @default.
• W2981917119 cites W2344764410 @default.
• W2981917119 cites W2515272532 @default.
• W2981917119 cites W2580994567 @default.
• W2981917119 cites W2737860679 @default.
• W2981917119 cites W2765336661 @default.
• W2981917119 cites W2773867118 @default.
• W2981917119 cites W2795285915 @default.
• W2981917119 cites W2806966564 @default.
• W2981917119 cites W2921402410 @default.
• W2981917119 cites W3099312374 @default.
• W2981917119 doi "https://doi.org/10.1088/1674-1056/ab50fe" @default.
• W2981917119 hasPublicationYear "2019" @default.
• W2981917119 type Work @default.
• W2981917119 sameAs 2981917119 @default.
• W2981917119 citedByCount "3" @default.
• W2981917119 countsByYear W29819171192021 @default.
• W2981917119 countsByYear W29819171192022 @default.
• W2981917119 crossrefType "journal-article" @default.
• W2981917119 hasAuthorship W2981917119A5019918915 @default.
• W2981917119 hasAuthorship W2981917119A5035415582 @default.
• W2981917119 hasAuthorship W2981917119A5044914665 @default.
• W2981917119 hasAuthorship W2981917119A5074078628 @default.
• W2981917119 hasConcept C103566474 @default.
• W2981917119 hasConcept C113196181 @default.
• W2981917119 hasConcept C119599485 @default.
• W2981917119 hasConcept C121332964 @default.
• W2981917119 hasConcept C127413603 @default.
• W2981917119 hasConcept C133386390 @default.
• W2981917119 hasConcept C145598152 @default.
• W2981917119 hasConcept C16317505 @default.
• W2981917119 hasConcept C165801399 @default.
• W2981917119 hasConcept C166972891 @default.
• W2981917119 hasConcept C172385210 @default.
• W2981917119 hasConcept C185592680 @default.
• W2981917119 hasConcept C192562407 @default.
• W2981917119 hasConcept C2982823382 @default.
• W2981917119 hasConcept C43617362 @default.
• W2981917119 hasConcept C49040817 @default.
• W2981917119 hasConcept C52192207 @default.
• W2981917119 hasConcept C62520636 @default.
• W2981917119 hasConcept C82706917 @default.
• W2981917119 hasConceptScore W2981917119C103566474 @default.
• W2981917119 hasConceptScore W2981917119C113196181 @default.
• W2981917119 hasConceptScore W2981917119C119599485 @default.
• W2981917119 hasConceptScore W2981917119C121332964 @default.
• W2981917119 hasConceptScore W2981917119C127413603 @default.
• W2981917119 hasConceptScore W2981917119C133386390 @default.
• W2981917119 hasConceptScore W2981917119C145598152 @default.
• W2981917119 hasConceptScore W2981917119C16317505 @default.
• W2981917119 hasConceptScore W2981917119C165801399 @default.
• W2981917119 hasConceptScore W2981917119C166972891 @default.
• W2981917119 hasConceptScore W2981917119C172385210 @default.
• W2981917119 hasConceptScore W2981917119C185592680 @default.
• W2981917119 hasConceptScore W2981917119C192562407 @default.
• W2981917119 hasConceptScore W2981917119C2982823382 @default.
• W2981917119 hasConceptScore W2981917119C43617362 @default.
• W2981917119 hasConceptScore W2981917119C49040817 @default.
• W2981917119 hasConceptScore W2981917119C52192207 @default.
• W2981917119 hasConceptScore W2981917119C62520636 @default.
• W2981917119 hasConceptScore W2981917119C82706917 @default.
• W2981917119 hasIssue "12" @default.
• W2981917119 hasLocation W29819171191 @default.
• W2981917119 hasOpenAccess W2981917119 @default.
• W2981917119 hasPrimaryLocation W29819171191 @default.

• next