Matches in SemOpenAlex for { <https://semopenalex.org/work/W2982032348> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2982032348 abstract "Abstract This paper discusses the implementation of GHz-Scanning Acoustic Microscopy (GHz-SAM) into a wafer level scanning tool and its application for the detection of delamination at the interface of hybrid bonded wafers. It is demonstrated that the in-plane resolution of the GHz-SAM technique can be enhanced by thinning the sample. In the current study this thinning step has been performed by the ion beam of a ToF-SIMS tool containing an in-situ AFM, which allows not only chemical analysis of the interface but also a well-controlled local thinning (size, depth and roughness)." @default.
- W2982032348 created "2019-11-01" @default.
- W2982032348 creator A5012450896 @default.
- W2982032348 creator A5016297190 @default.
- W2982032348 creator A5022934119 @default.
- W2982032348 creator A5025917420 @default.
- W2982032348 creator A5043844856 @default.
- W2982032348 creator A5055367643 @default.
- W2982032348 creator A5073310038 @default.
- W2982032348 creator A5080962704 @default.
- W2982032348 date "2019-12-01" @default.
- W2982032348 modified "2023-10-16" @default.
- W2982032348 title "GHz-Scanning Acoustic Microscopy Combined with ToF-SIMS/AFM for Wafer-Level Failure Analysis of Bonding Interfaces" @default.
- W2982032348 doi "https://doi.org/10.31399/asm.cp.istfa2019p0029" @default.
- W2982032348 hasPublicationYear "2019" @default.
- W2982032348 type Work @default.
- W2982032348 sameAs 2982032348 @default.
- W2982032348 citedByCount "0" @default.
- W2982032348 crossrefType "proceedings-article" @default.
- W2982032348 hasAuthorship W2982032348A5012450896 @default.
- W2982032348 hasAuthorship W2982032348A5016297190 @default.
- W2982032348 hasAuthorship W2982032348A5022934119 @default.
- W2982032348 hasAuthorship W2982032348A5025917420 @default.
- W2982032348 hasAuthorship W2982032348A5043844856 @default.
- W2982032348 hasAuthorship W2982032348A5055367643 @default.
- W2982032348 hasAuthorship W2982032348A5073310038 @default.
- W2982032348 hasAuthorship W2982032348A5080962704 @default.
- W2982032348 hasConcept C100460472 @default.
- W2982032348 hasConcept C120665830 @default.
- W2982032348 hasConcept C121332964 @default.
- W2982032348 hasConcept C138268822 @default.
- W2982032348 hasConcept C147080431 @default.
- W2982032348 hasConcept C151730666 @default.
- W2982032348 hasConcept C154945302 @default.
- W2982032348 hasConcept C159985019 @default.
- W2982032348 hasConcept C160671074 @default.
- W2982032348 hasConcept C18903297 @default.
- W2982032348 hasConcept C192562407 @default.
- W2982032348 hasConcept C2778759172 @default.
- W2982032348 hasConcept C2779133538 @default.
- W2982032348 hasConcept C2779227376 @default.
- W2982032348 hasConcept C2781117724 @default.
- W2982032348 hasConcept C2781353100 @default.
- W2982032348 hasConcept C30239060 @default.
- W2982032348 hasConcept C41008148 @default.
- W2982032348 hasConcept C49040817 @default.
- W2982032348 hasConcept C58097730 @default.
- W2982032348 hasConcept C71039073 @default.
- W2982032348 hasConcept C77928131 @default.
- W2982032348 hasConcept C86803240 @default.
- W2982032348 hasConceptScore W2982032348C100460472 @default.
- W2982032348 hasConceptScore W2982032348C120665830 @default.
- W2982032348 hasConceptScore W2982032348C121332964 @default.
- W2982032348 hasConceptScore W2982032348C138268822 @default.
- W2982032348 hasConceptScore W2982032348C147080431 @default.
- W2982032348 hasConceptScore W2982032348C151730666 @default.
- W2982032348 hasConceptScore W2982032348C154945302 @default.
- W2982032348 hasConceptScore W2982032348C159985019 @default.
- W2982032348 hasConceptScore W2982032348C160671074 @default.
- W2982032348 hasConceptScore W2982032348C18903297 @default.
- W2982032348 hasConceptScore W2982032348C192562407 @default.
- W2982032348 hasConceptScore W2982032348C2778759172 @default.
- W2982032348 hasConceptScore W2982032348C2779133538 @default.
- W2982032348 hasConceptScore W2982032348C2779227376 @default.
- W2982032348 hasConceptScore W2982032348C2781117724 @default.
- W2982032348 hasConceptScore W2982032348C2781353100 @default.
- W2982032348 hasConceptScore W2982032348C30239060 @default.
- W2982032348 hasConceptScore W2982032348C41008148 @default.
- W2982032348 hasConceptScore W2982032348C49040817 @default.
- W2982032348 hasConceptScore W2982032348C58097730 @default.
- W2982032348 hasConceptScore W2982032348C71039073 @default.
- W2982032348 hasConceptScore W2982032348C77928131 @default.
- W2982032348 hasConceptScore W2982032348C86803240 @default.
- W2982032348 hasLocation W29820323481 @default.
- W2982032348 hasOpenAccess W2982032348 @default.
- W2982032348 hasPrimaryLocation W29820323481 @default.
- W2982032348 hasRelatedWork W1504127851 @default.
- W2982032348 hasRelatedWork W1842259271 @default.
- W2982032348 hasRelatedWork W1966818311 @default.
- W2982032348 hasRelatedWork W1989713230 @default.
- W2982032348 hasRelatedWork W2004468669 @default.
- W2982032348 hasRelatedWork W2018308962 @default.
- W2982032348 hasRelatedWork W2099752079 @default.
- W2982032348 hasRelatedWork W2808047258 @default.
- W2982032348 hasRelatedWork W2982032348 @default.
- W2982032348 hasRelatedWork W4301649752 @default.
- W2982032348 isParatext "false" @default.
- W2982032348 isRetracted "false" @default.
- W2982032348 magId "2982032348" @default.
- W2982032348 workType "article" @default.