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- W2982490550 abstract "An AlSiN film was deposited by cathodic arc evaporation. The structure and composition of the film were investigated by XRD, EDS and XPS analyses. The film had a nanocomposite structure consisting of (AlSi)N nanograins incorporated in a Si3N4 matrix. The film hardness determined by nanoindentation measurements was found to be 46 GPa. The AlSiN nanocomposite demonstrated improved elastic strain to failure (H/E=0.10), very good resistance to plastic deformation (H3/E2=0.44) and elastic recovery of 67%, which indicated improved toughness. The nanocomposite AlSiN film exhibited a low friction coefficient of 0.9 against the diamond indenter and enhanced wear resistance with wear rate of 7.56×10−10 mm3/ (N.GPa.m)." @default.
- W2982490550 created "2019-11-08" @default.
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- W2982490550 date "2019-09-01" @default.
- W2982490550 modified "2023-09-25" @default.
- W2982490550 title "An AlSiN Nanocomposite Film with Improved Mechanical Parameters for Multifunctional Applications" @default.
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- W2982490550 doi "https://doi.org/10.1109/miel.2019.8889603" @default.
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