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• W2982991447 abstract "Micromechanical cantilevers are attractive devices for force measurements. We report the results obtained for SMMM (Soft MetMolMEMS) silicon cantilever fabricated on silicon on insulator (SOI) substrate with piezoresistive deflection readout with the stiffness much lower than the typical piezoresistive silicon cantilever. The cantilever mechanical properties were characterised with laser vibrometer using the thermal noise technique (resonant frequency fres=5474.2 Hz, quality factor Q=19.4 and stiffness k=0.042 Nm−1). The piezoresistive detection sensitivity was evaluated by measuring externally induced mechanical vibrations optically with laser vibrometer and electrically using current-to-voltage converter and lock-in amplifier simultaneously. We obtained deflection sensitivity DS=11 Vm−1 and force sensitivity FS = 263 VN−1 assuming typical bias voltage of 2 V. Such silicon cantilever may be successfully used in AFM investigation of fragile structures." @default.
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• W2982991447 date "2020-01-01" @default.
• W2982991447 modified "2023-10-01" @default.
• W2982991447 title "Soft piezoresistive cantilevers for adhesion force measurements" @default.
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• W2982991447 doi "https://doi.org/10.1016/j.sna.2019.111747" @default.
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