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- W2984734282 abstract "The fabrication and characterization of electrostatically-driven microrelays integrated together with IC components are presented. The mechanical part of the microrelays consists of a polysilicon-silicon nitride-polysilicon microbridge realized by sacrificial layer technology and allowing one to separate the actuation and the working circuit. The main operational parameters are actuation voltages in the 50 V to 75 V range depending on the beam lengths of the relays; switching frequencies up to 20 kHz with negligible electrical cross-talk between actuation and working port; a maximum measured frequency of 75 kHz without damaging the microrelay; a rise time of 4 /spl mu/s and a fall time of 1 /spl mu/s. First experiments in nitrogen atmosphere have shown that the relay is able to cycle over 10/sup 9/ times with no significant changes in its electromechanical properties." @default.
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- W2984734282 date "1994-01-01" @default.
- W2984734282 modified "2023-09-26" @default.
- W2984734282 title "Electrostatic Polysilicon Microrelays Integrated with MOSFETs" @default.
- W2984734282 hasPublicationYear "1994" @default.
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