Matches in SemOpenAlex for { <https://semopenalex.org/work/W2985913907> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2985913907 abstract "We observed the emission characteristics and stability of TiN-coated Si field emitter arrays (FEAs) with a TiW gate structure. The TiN layer on Si tips was formed by a two-step rapid thermal nitridation process in an NH3 ambient by which a Ti layer was thermally converted to a TiN/ TiSi2 bilayer. This process could suppress the formation of TiO2 on the surface and make the TiN layer thicker than a one-step process. By coating Si tips with TiN, the operating voltage of the TiN-coated Si FEAs was reduced by about 20 V compared with non-coated ones. Also, the TiN-coated Si FEAs showed thermally stable electron emission compared with non-coated ones." @default.
- W2985913907 created "2019-11-22" @default.
- W2985913907 creator A5010021409 @default.
- W2985913907 creator A5010715062 @default.
- W2985913907 creator A5026843134 @default.
- W2985913907 creator A5046819573 @default.
- W2985913907 creator A5073023359 @default.
- W2985913907 creator A5085485779 @default.
- W2985913907 date "1997-01-01" @default.
- W2985913907 modified "2023-09-24" @default.
- W2985913907 title "Emission Characteristics of TiN-Coated Silicon Field Emitter Arrays" @default.
- W2985913907 hasPublicationYear "1997" @default.
- W2985913907 type Work @default.
- W2985913907 sameAs 2985913907 @default.
- W2985913907 citedByCount "0" @default.
- W2985913907 crossrefType "proceedings-article" @default.
- W2985913907 hasAuthorship W2985913907A5010021409 @default.
- W2985913907 hasAuthorship W2985913907A5010715062 @default.
- W2985913907 hasAuthorship W2985913907A5026843134 @default.
- W2985913907 hasAuthorship W2985913907A5046819573 @default.
- W2985913907 hasAuthorship W2985913907A5073023359 @default.
- W2985913907 hasAuthorship W2985913907A5085485779 @default.
- W2985913907 hasConcept C121029787 @default.
- W2985913907 hasConcept C121332964 @default.
- W2985913907 hasConcept C147120987 @default.
- W2985913907 hasConcept C171250308 @default.
- W2985913907 hasConcept C191897082 @default.
- W2985913907 hasConcept C192157962 @default.
- W2985913907 hasConcept C192562407 @default.
- W2985913907 hasConcept C2779227376 @default.
- W2985913907 hasConcept C2781448156 @default.
- W2985913907 hasConcept C41625074 @default.
- W2985913907 hasConcept C46918542 @default.
- W2985913907 hasConcept C49040817 @default.
- W2985913907 hasConcept C525849907 @default.
- W2985913907 hasConcept C54355233 @default.
- W2985913907 hasConcept C544956773 @default.
- W2985913907 hasConcept C62520636 @default.
- W2985913907 hasConcept C86803240 @default.
- W2985913907 hasConceptScore W2985913907C121029787 @default.
- W2985913907 hasConceptScore W2985913907C121332964 @default.
- W2985913907 hasConceptScore W2985913907C147120987 @default.
- W2985913907 hasConceptScore W2985913907C171250308 @default.
- W2985913907 hasConceptScore W2985913907C191897082 @default.
- W2985913907 hasConceptScore W2985913907C192157962 @default.
- W2985913907 hasConceptScore W2985913907C192562407 @default.
- W2985913907 hasConceptScore W2985913907C2779227376 @default.
- W2985913907 hasConceptScore W2985913907C2781448156 @default.
- W2985913907 hasConceptScore W2985913907C41625074 @default.
- W2985913907 hasConceptScore W2985913907C46918542 @default.
- W2985913907 hasConceptScore W2985913907C49040817 @default.
- W2985913907 hasConceptScore W2985913907C525849907 @default.
- W2985913907 hasConceptScore W2985913907C54355233 @default.
- W2985913907 hasConceptScore W2985913907C544956773 @default.
- W2985913907 hasConceptScore W2985913907C62520636 @default.
- W2985913907 hasConceptScore W2985913907C86803240 @default.
- W2985913907 hasLocation W29859139071 @default.
- W2985913907 hasOpenAccess W2985913907 @default.
- W2985913907 hasPrimaryLocation W29859139071 @default.
- W2985913907 hasRelatedWork W1925178102 @default.
- W2985913907 hasRelatedWork W1964016956 @default.
- W2985913907 hasRelatedWork W2013679591 @default.
- W2985913907 hasRelatedWork W2026232845 @default.
- W2985913907 hasRelatedWork W2048130369 @default.
- W2985913907 hasRelatedWork W2056365772 @default.
- W2985913907 hasRelatedWork W2062335409 @default.
- W2985913907 hasRelatedWork W2073394499 @default.
- W2985913907 hasRelatedWork W2074052058 @default.
- W2985913907 hasRelatedWork W2108559335 @default.
- W2985913907 hasRelatedWork W2151575527 @default.
- W2985913907 hasRelatedWork W2401431050 @default.
- W2985913907 hasRelatedWork W2885903659 @default.
- W2985913907 hasRelatedWork W2908843110 @default.
- W2985913907 hasRelatedWork W3092642511 @default.
- W2985913907 hasRelatedWork W3162250851 @default.
- W2985913907 hasRelatedWork W2263661483 @default.
- W2985913907 hasRelatedWork W2399722102 @default.
- W2985913907 hasRelatedWork W2841732659 @default.
- W2985913907 hasRelatedWork W3146880053 @default.
- W2985913907 isParatext "false" @default.
- W2985913907 isRetracted "false" @default.
- W2985913907 magId "2985913907" @default.
- W2985913907 workType "article" @default.