FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2986284906> ?p ?o ?g. }

• W2986284906 endingPage "99" @default.
• W2986284906 startingPage "95" @default.
• W2986284906 abstract "MEMS atomic vapor cells have a large variety of applications in chip-scale atomic devices such as clocks, gyroscopes or magnetometers. These cells are usually hermetically sealed by anodic bonding of borosilicate to silicon, a proven and reliable method, yet showing specific limitations such as inherent oxygen contamination of the cavity or limitation to a few combinations of materials. As an alternative, we report on the successful wafer-level fabrication of cells sealed by Cu-Cu thermocompression bonding. This alternative technique allows to overcome the constraints of anodic bonding while allowing a new variety of other materials. Characterization of the bonding quality is presented as well as a spectroscopic characterization in view of use for chip-scale atomic clocks (CSACs)." @default.
• W2986284906 created "2019-11-22" @default.
• W2986284906 creator A5001852947 @default.
• W2986284906 creator A5043108905 @default.
• W2986284906 creator A5058247076 @default.
• W2986284906 creator A5071810381 @default.
• W2986284906 creator A5085460183 @default.
• W2986284906 date "2020-02-01" @default.
• W2986284906 modified "2023-10-04" @default.
• W2986284906 title "Sealing of MEMS Atomic Vapor Cells Using Cu-Cu Thermocompression Bonding" @default.
• W2986284906 cites W1533308661 @default.
• W2986284906 cites W2015577797 @default.
• W2986284906 cites W2040987087 @default.
• W2986284906 cites W2042067503 @default.
• W2986284906 cites W2042923925 @default.
• W2986284906 cites W2060406579 @default.
• W2986284906 cites W2065836049 @default.
• W2986284906 cites W2068060067 @default.
• W2986284906 cites W2084410014 @default.
• W2986284906 cites W2090308595 @default.
• W2986284906 cites W2092846882 @default.
• W2986284906 cites W2094177705 @default.
• W2986284906 cites W2112161471 @default.
• W2986284906 cites W2119517129 @default.
• W2986284906 cites W2152747678 @default.
• W2986284906 cites W2164225347 @default.
• W2986284906 cites W2167136240 @default.
• W2986284906 cites W2236995982 @default.
• W2986284906 cites W2416531991 @default.
• W2986284906 cites W2582106871 @default.
• W2986284906 cites W2765176353 @default.
• W2986284906 cites W2796629913 @default.
• W2986284906 cites W2885093294 @default.
• W2986284906 cites W3106479965 @default.
• W2986284906 doi "https://doi.org/10.1109/jmems.2019.2949349" @default.
• W2986284906 hasPublicationYear "2020" @default.
• W2986284906 type Work @default.
• W2986284906 sameAs 2986284906 @default.
• W2986284906 citedByCount "14" @default.
• W2986284906 countsByYear W29862849062020 @default.
• W2986284906 countsByYear W29862849062021 @default.
• W2986284906 countsByYear W29862849062022 @default.
• W2986284906 countsByYear W29862849062023 @default.
• W2986284906 crossrefType "journal-article" @default.
• W2986284906 hasAuthorship W2986284906A5001852947 @default.
• W2986284906 hasAuthorship W2986284906A5043108905 @default.
• W2986284906 hasAuthorship W2986284906A5058247076 @default.
• W2986284906 hasAuthorship W2986284906A5071810381 @default.
• W2986284906 hasAuthorship W2986284906A5085460183 @default.
• W2986284906 hasConcept C119599485 @default.
• W2986284906 hasConcept C121332964 @default.
• W2986284906 hasConcept C127413603 @default.
• W2986284906 hasConcept C136525101 @default.
• W2986284906 hasConcept C140269135 @default.
• W2986284906 hasConcept C142724271 @default.
• W2986284906 hasConcept C160671074 @default.
• W2986284906 hasConcept C165005293 @default.
• W2986284906 hasConcept C171250308 @default.
• W2986284906 hasConcept C191897082 @default.
• W2986284906 hasConcept C192562407 @default.
• W2986284906 hasConcept C201414436 @default.
• W2986284906 hasConcept C201845621 @default.
• W2986284906 hasConcept C204787440 @default.
• W2986284906 hasConcept C206802598 @default.
• W2986284906 hasConcept C2779133538 @default.
• W2986284906 hasConcept C2779227376 @default.
• W2986284906 hasConcept C2780841128 @default.
• W2986284906 hasConcept C37977207 @default.
• W2986284906 hasConcept C49040817 @default.
• W2986284906 hasConcept C544956773 @default.
• W2986284906 hasConcept C62520636 @default.
• W2986284906 hasConcept C66823137 @default.
• W2986284906 hasConcept C71924100 @default.
• W2986284906 hasConceptScore W2986284906C119599485 @default.
• W2986284906 hasConceptScore W2986284906C121332964 @default.
• W2986284906 hasConceptScore W2986284906C127413603 @default.
• W2986284906 hasConceptScore W2986284906C136525101 @default.
• W2986284906 hasConceptScore W2986284906C140269135 @default.
• W2986284906 hasConceptScore W2986284906C142724271 @default.
• W2986284906 hasConceptScore W2986284906C160671074 @default.
• W2986284906 hasConceptScore W2986284906C165005293 @default.
• W2986284906 hasConceptScore W2986284906C171250308 @default.
• W2986284906 hasConceptScore W2986284906C191897082 @default.
• W2986284906 hasConceptScore W2986284906C192562407 @default.
• W2986284906 hasConceptScore W2986284906C201414436 @default.
• W2986284906 hasConceptScore W2986284906C201845621 @default.
• W2986284906 hasConceptScore W2986284906C204787440 @default.
• W2986284906 hasConceptScore W2986284906C206802598 @default.
• W2986284906 hasConceptScore W2986284906C2779133538 @default.
• W2986284906 hasConceptScore W2986284906C2779227376 @default.
• W2986284906 hasConceptScore W2986284906C2780841128 @default.
• W2986284906 hasConceptScore W2986284906C37977207 @default.
• W2986284906 hasConceptScore W2986284906C49040817 @default.
• W2986284906 hasConceptScore W2986284906C544956773 @default.
• W2986284906 hasConceptScore W2986284906C62520636 @default.
• W2986284906 hasConceptScore W2986284906C66823137 @default.
• W2986284906 hasConceptScore W2986284906C71924100 @default.
• W2986284906 hasFunder F4320318240 @default.

• next