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- W2987138169 abstract "Transient plasmas (such as pulsed power plasmas) can be of interest to both industry, where they allow for new processing windows, and basic science, where their dynamics are of interest. However, their study requires time resolved diagnostic techniques. One powerful diagnostic is current and voltage (IV) measurements, which along with the power and impedance calculated from them, can be used to characterize a plasma. This is especially true as it is an outside the chamber, noninvasive technique and can be used in systems where a probe or fiber optic bundle/window will affect processing results or fail due to deposition. To obtain accurate IV values, frequency dependent probe calibrations must be performed and frequency dependent parasitic impedances in the system and propagation delay between the forward traveling fundamental frequency and backward traveling harmonic frequencies must be taken into account. To separate the fundamental and harmonic frequencies, a fast Fourier transform (FFT) is traditionally performed in continuous wave plasmas. In transient plasmas, a time resolved FFT is necessary. This article presents a method to perform each of these steps while demonstrating their importance and giving some measurements of a pulsed power, 75 mTorr, capacitively coupled argon plasma." @default.
- W2987138169 created "2019-11-22" @default.
- W2987138169 creator A5006029597 @default.
- W2987138169 creator A5032192251 @default.
- W2987138169 creator A5091669385 @default.
- W2987138169 date "2019-11-01" @default.
- W2987138169 modified "2023-09-27" @default.
- W2987138169 title "Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma" @default.
- W2987138169 cites W1966659063 @default.
- W2987138169 cites W1969051879 @default.
- W2987138169 cites W1985668078 @default.
- W2987138169 cites W1985999685 @default.
- W2987138169 cites W1987856106 @default.
- W2987138169 cites W1994305793 @default.
- W2987138169 cites W2020045108 @default.
- W2987138169 cites W2024331567 @default.
- W2987138169 cites W2027066175 @default.
- W2987138169 cites W2077673183 @default.
- W2987138169 cites W2084191371 @default.
- W2987138169 cites W2087171002 @default.
- W2987138169 cites W2089567219 @default.
- W2987138169 cites W2094529056 @default.
- W2987138169 cites W2095440262 @default.
- W2987138169 cites W2100125289 @default.
- W2987138169 cites W2112552636 @default.
- W2987138169 cites W2124381594 @default.
- W2987138169 cites W2142932088 @default.
- W2987138169 cites W2150759874 @default.
- W2987138169 cites W2164335666 @default.
- W2987138169 cites W2287516584 @default.
- W2987138169 cites W2460576357 @default.
- W2987138169 cites W2757965425 @default.
- W2987138169 cites W3101152030 @default.
- W2987138169 cites W4235326677 @default.
- W2987138169 doi "https://doi.org/10.1116/1.5132753" @default.
- W2987138169 hasPublicationYear "2019" @default.
- W2987138169 type Work @default.
- W2987138169 sameAs 2987138169 @default.
- W2987138169 citedByCount "7" @default.
- W2987138169 countsByYear W29871381692020 @default.
- W2987138169 countsByYear W29871381692021 @default.
- W2987138169 countsByYear W29871381692022 @default.
- W2987138169 countsByYear W29871381692023 @default.
- W2987138169 crossrefType "journal-article" @default.
- W2987138169 hasAuthorship W2987138169A5006029597 @default.
- W2987138169 hasAuthorship W2987138169A5032192251 @default.
- W2987138169 hasAuthorship W2987138169A5091669385 @default.
- W2987138169 hasBestOaLocation W29871381691 @default.
- W2987138169 hasConcept C111919701 @default.
- W2987138169 hasConcept C11413529 @default.
- W2987138169 hasConcept C121332964 @default.
- W2987138169 hasConcept C127934551 @default.
- W2987138169 hasConcept C17829176 @default.
- W2987138169 hasConcept C184779094 @default.
- W2987138169 hasConcept C192562407 @default.
- W2987138169 hasConcept C24890656 @default.
- W2987138169 hasConcept C2780799671 @default.
- W2987138169 hasConcept C41008148 @default.
- W2987138169 hasConcept C43503373 @default.
- W2987138169 hasConcept C547737533 @default.
- W2987138169 hasConcept C62520636 @default.
- W2987138169 hasConcept C75172450 @default.
- W2987138169 hasConcept C82706917 @default.
- W2987138169 hasConceptScore W2987138169C111919701 @default.
- W2987138169 hasConceptScore W2987138169C11413529 @default.
- W2987138169 hasConceptScore W2987138169C121332964 @default.
- W2987138169 hasConceptScore W2987138169C127934551 @default.
- W2987138169 hasConceptScore W2987138169C17829176 @default.
- W2987138169 hasConceptScore W2987138169C184779094 @default.
- W2987138169 hasConceptScore W2987138169C192562407 @default.
- W2987138169 hasConceptScore W2987138169C24890656 @default.
- W2987138169 hasConceptScore W2987138169C2780799671 @default.
- W2987138169 hasConceptScore W2987138169C41008148 @default.
- W2987138169 hasConceptScore W2987138169C43503373 @default.
- W2987138169 hasConceptScore W2987138169C547737533 @default.
- W2987138169 hasConceptScore W2987138169C62520636 @default.
- W2987138169 hasConceptScore W2987138169C75172450 @default.
- W2987138169 hasConceptScore W2987138169C82706917 @default.
- W2987138169 hasFunder F4320306076 @default.
- W2987138169 hasFunder F4320309441 @default.
- W2987138169 hasFunder F4320309679 @default.
- W2987138169 hasIssue "6" @default.
- W2987138169 hasLocation W29871381691 @default.
- W2987138169 hasOpenAccess W2987138169 @default.
- W2987138169 hasPrimaryLocation W29871381691 @default.
- W2987138169 hasRelatedWork W1597425004 @default.
- W2987138169 hasRelatedWork W1978583938 @default.
- W2987138169 hasRelatedWork W1982160538 @default.
- W2987138169 hasRelatedWork W1993406644 @default.
- W2987138169 hasRelatedWork W2041634047 @default.
- W2987138169 hasRelatedWork W2140132324 @default.
- W2987138169 hasRelatedWork W2168835588 @default.
- W2987138169 hasRelatedWork W2332497334 @default.
- W2987138169 hasRelatedWork W2745172596 @default.
- W2987138169 hasRelatedWork W3012034900 @default.
- W2987138169 hasVolume "37" @default.
- W2987138169 isParatext "false" @default.
- W2987138169 isRetracted "false" @default.
- W2987138169 magId "2987138169" @default.
- W2987138169 workType "article" @default.