Matches in SemOpenAlex for { <https://semopenalex.org/work/W2987281558> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2987281558 endingPage "125352" @default.
- W2987281558 startingPage "125352" @default.
- W2987281558 abstract "In this paper, Schottky structures were fabricated on the epitaxial wafers and the deep levels of the wafers were measured by deep level transient spectroscopy (DLTS). The thickness of the commercial n-type 4°off-axis 4H-SiC (0 0 0 1) epitaxial wafers was 100 μm, with a doping concentration of 2 × 1014 cm−3. Nine sample points were selected along with the direction of [1–100] and [11–20] on the wafer. Through the peak fitting analysis of the test results, the detailed information of deep level defects in the epitaxial layer was obtained. The typical deep level defect Z1/2 was found, but Ti center did not appear, which indicates that Ti center was not introduced in our technological process. Defect concentration uniformity of the 4-inch 4H-SiC epitaxial wafer is 5.74%. The results demonstrate that although the concentration of Z1/2 defect differs in different locations, but the difference is so small that Z1/2 defect concentration can be considered to be evenly distributed across the wafer." @default.
- W2987281558 created "2019-11-22" @default.
- W2987281558 creator A5000130762 @default.
- W2987281558 creator A5000732757 @default.
- W2987281558 creator A5007755497 @default.
- W2987281558 creator A5027343203 @default.
- W2987281558 creator A5041000097 @default.
- W2987281558 creator A5057802244 @default.
- W2987281558 creator A5058903146 @default.
- W2987281558 creator A5071235043 @default.
- W2987281558 creator A5074005571 @default.
- W2987281558 date "2020-02-01" @default.
- W2987281558 modified "2023-10-18" @default.
- W2987281558 title "Investigation of the distribution of deep levels in 4H-SiC epitaxial wafer by DLTS with the method of decussate sampling" @default.
- W2987281558 cites W1999824529 @default.
- W2987281558 cites W2010831864 @default.
- W2987281558 cites W2016989864 @default.
- W2987281558 cites W2058818432 @default.
- W2987281558 cites W2068491671 @default.
- W2987281558 cites W2069963706 @default.
- W2987281558 cites W2084148883 @default.
- W2987281558 cites W2090347308 @default.
- W2987281558 cites W2090759186 @default.
- W2987281558 cites W2124675890 @default.
- W2987281558 cites W2253975581 @default.
- W2987281558 cites W2342657533 @default.
- W2987281558 cites W2344846171 @default.
- W2987281558 cites W2805532355 @default.
- W2987281558 doi "https://doi.org/10.1016/j.jcrysgro.2019.125352" @default.
- W2987281558 hasPublicationYear "2020" @default.
- W2987281558 type Work @default.
- W2987281558 sameAs 2987281558 @default.
- W2987281558 citedByCount "0" @default.
- W2987281558 crossrefType "journal-article" @default.
- W2987281558 hasAuthorship W2987281558A5000130762 @default.
- W2987281558 hasAuthorship W2987281558A5000732757 @default.
- W2987281558 hasAuthorship W2987281558A5007755497 @default.
- W2987281558 hasAuthorship W2987281558A5027343203 @default.
- W2987281558 hasAuthorship W2987281558A5041000097 @default.
- W2987281558 hasAuthorship W2987281558A5057802244 @default.
- W2987281558 hasAuthorship W2987281558A5058903146 @default.
- W2987281558 hasAuthorship W2987281558A5071235043 @default.
- W2987281558 hasAuthorship W2987281558A5074005571 @default.
- W2987281558 hasConcept C110738630 @default.
- W2987281558 hasConcept C113196181 @default.
- W2987281558 hasConcept C159985019 @default.
- W2987281558 hasConcept C160671074 @default.
- W2987281558 hasConcept C185592680 @default.
- W2987281558 hasConcept C192562407 @default.
- W2987281558 hasConcept C2779227376 @default.
- W2987281558 hasConcept C43617362 @default.
- W2987281558 hasConcept C49040817 @default.
- W2987281558 hasConcept C57863236 @default.
- W2987281558 hasConceptScore W2987281558C110738630 @default.
- W2987281558 hasConceptScore W2987281558C113196181 @default.
- W2987281558 hasConceptScore W2987281558C159985019 @default.
- W2987281558 hasConceptScore W2987281558C160671074 @default.
- W2987281558 hasConceptScore W2987281558C185592680 @default.
- W2987281558 hasConceptScore W2987281558C192562407 @default.
- W2987281558 hasConceptScore W2987281558C2779227376 @default.
- W2987281558 hasConceptScore W2987281558C43617362 @default.
- W2987281558 hasConceptScore W2987281558C49040817 @default.
- W2987281558 hasConceptScore W2987281558C57863236 @default.
- W2987281558 hasFunder F4320321001 @default.
- W2987281558 hasFunder F4320322919 @default.
- W2987281558 hasFunder F4320334978 @default.
- W2987281558 hasFunder F4320336025 @default.
- W2987281558 hasLocation W29872815581 @default.
- W2987281558 hasOpenAccess W2987281558 @default.
- W2987281558 hasPrimaryLocation W29872815581 @default.
- W2987281558 hasRelatedWork W1974367901 @default.
- W2987281558 hasRelatedWork W2007522409 @default.
- W2987281558 hasRelatedWork W2009964935 @default.
- W2987281558 hasRelatedWork W2030420874 @default.
- W2987281558 hasRelatedWork W2043122570 @default.
- W2987281558 hasRelatedWork W2139871202 @default.
- W2987281558 hasRelatedWork W2322385403 @default.
- W2987281558 hasRelatedWork W2743194952 @default.
- W2987281558 hasRelatedWork W2806551637 @default.
- W2987281558 hasRelatedWork W2964190889 @default.
- W2987281558 hasVolume "531" @default.
- W2987281558 isParatext "false" @default.
- W2987281558 isRetracted "false" @default.
- W2987281558 magId "2987281558" @default.
- W2987281558 workType "article" @default.