FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2989828068> ?p ?o ?g. }

• W2989828068 endingPage "834" @default.
• W2989828068 startingPage "834" @default.
• W2989828068 abstract "Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases. It combines the established concepts of focused electron beam induced processing (FEBIP) and X-ray lithography (XRL). The present setup is based on a scanning transmission X-ray microscope (STXM) equipped with a gas flow cell to provide metal organic precursor molecules towards the intended deposition zone. Fundamentals of X-ray microscopy instrumentation and X-ray radiation chemistry relevant for FXBID development are presented in a comprehensive form. Recently published proof-of-concept studies on initial experiments on FXBID nanolithography are reviewed for an overview on current progress and proposed advances of nanofabrication performance. Potential applications and advantages of FXBID are discussed with respect to competing electron/ion based techniques." @default.
• W2989828068 created "2019-12-05" @default.
• W2989828068 creator A5040195701 @default.
• W2989828068 date "2019-11-30" @default.
• W2989828068 modified "2023-10-18" @default.
• W2989828068 title "Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities" @default.
• W2989828068 cites W1554452027 @default.
• W2989828068 cites W1857743476 @default.
• W2989828068 cites W1966658184 @default.
• W2989828068 cites W1968435237 @default.
• W2989828068 cites W1968649238 @default.
• W2989828068 cites W1970873003 @default.
• W2989828068 cites W1971302485 @default.
• W2989828068 cites W1973348015 @default.
• W2989828068 cites W1973381743 @default.
• W2989828068 cites W1973792046 @default.
• W2989828068 cites W1975872714 @default.
• W2989828068 cites W1976618506 @default.
• W2989828068 cites W1976854385 @default.
• W2989828068 cites W1978276690 @default.
• W2989828068 cites W1978830058 @default.
• W2989828068 cites W1980568466 @default.
• W2989828068 cites W1990614317 @default.
• W2989828068 cites W1993638870 @default.
• W2989828068 cites W1994470979 @default.
• W2989828068 cites W2001638084 @default.
• W2989828068 cites W2004392673 @default.
• W2989828068 cites W2005001819 @default.
• W2989828068 cites W2006184254 @default.
• W2989828068 cites W2006593078 @default.
• W2989828068 cites W2010300694 @default.
• W2989828068 cites W2013280482 @default.
• W2989828068 cites W2018326513 @default.
• W2989828068 cites W2018514161 @default.
• W2989828068 cites W2018951073 @default.
• W2989828068 cites W2019380393 @default.
• W2989828068 cites W2022942138 @default.
• W2989828068 cites W2023749605 @default.
• W2989828068 cites W2026565881 @default.
• W2989828068 cites W2029548830 @default.
• W2989828068 cites W2030510419 @default.
• W2989828068 cites W2031340346 @default.
• W2989828068 cites W2031799986 @default.
• W2989828068 cites W2033481297 @default.
• W2989828068 cites W2035797964 @default.
• W2989828068 cites W2041052383 @default.
• W2989828068 cites W2044571501 @default.
• W2989828068 cites W2045874319 @default.
• W2989828068 cites W2048810064 @default.
• W2989828068 cites W2051868840 @default.
• W2989828068 cites W2052107125 @default.
• W2989828068 cites W2054116853 @default.
• W2989828068 cites W2061283386 @default.
• W2989828068 cites W2061368258 @default.
• W2989828068 cites W2063618289 @default.
• W2989828068 cites W2070886921 @default.
• W2989828068 cites W2072970411 @default.
• W2989828068 cites W2080250234 @default.
• W2989828068 cites W2084088167 @default.
• W2989828068 cites W2085805420 @default.
• W2989828068 cites W2087599743 @default.
• W2989828068 cites W2089195720 @default.
• W2989828068 cites W2089575608 @default.
• W2989828068 cites W2089686226 @default.
• W2989828068 cites W2091604189 @default.
• W2989828068 cites W2092348451 @default.
• W2989828068 cites W2095296046 @default.
• W2989828068 cites W2109695616 @default.
• W2989828068 cites W2117390340 @default.
• W2989828068 cites W2122838484 @default.
• W2989828068 cites W2124827109 @default.
• W2989828068 cites W2138786391 @default.
• W2989828068 cites W2154137384 @default.
• W2989828068 cites W2154364517 @default.
• W2989828068 cites W2158622305 @default.
• W2989828068 cites W2193323772 @default.
• W2989828068 cites W2196781087 @default.
• W2989828068 cites W2218440886 @default.
• W2989828068 cites W2227232614 @default.
• W2989828068 cites W2268743548 @default.
• W2989828068 cites W2269377332 @default.
• W2989828068 cites W2281905945 @default.
• W2989828068 cites W2482623286 @default.
• W2989828068 cites W2507595840 @default.
• W2989828068 cites W2526306972 @default.
• W2989828068 cites W2530733584 @default.
• W2989828068 cites W2555114999 @default.
• W2989828068 cites W2564267040 @default.
• W2989828068 cites W2604860933 @default.
• W2989828068 cites W2606734899 @default.
• W2989828068 cites W2616808769 @default.
• W2989828068 cites W2737648775 @default.
• W2989828068 cites W2746230987 @default.
• W2989828068 cites W2748858477 @default.
• W2989828068 cites W2753992659 @default.
• W2989828068 cites W2775812227 @default.
• W2989828068 cites W2781670954 @default.
• W2989828068 cites W2783528207 @default.

• next