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- W2990115411 abstract "In laser heat-mode lithography, the resist thin films absorb the laser spot energy and are heated, and then experience a structural change when the temperature exceeds to certain threshold point, such as crystallization, melting, and gasification." @default.
- W2990115411 created "2019-12-05" @default.
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- W2990115411 date "2019-01-01" @default.
- W2990115411 modified "2023-09-24" @default.
- W2990115411 title "Manipulation of Thermal Diffusion Channels" @default.
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- W2990115411 doi "https://doi.org/10.1007/978-981-15-0943-8_4" @default.
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