Matches in SemOpenAlex for { <https://semopenalex.org/work/W2990217811> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2990217811 abstract "This work describes the fabrication and characterization of silicon nitride waveguides for operation in the 2 µm to 3 µm range. Fabrication was carried out via PECVD and lithography techniques. Transmission losses were measured, with a tunable laser, to be ~20 dB between 2.0 µm and 2.3 µm, increasing to ~30 dB between 2.3 µm and 2.6 µm. Beyond 2.8 µm no transmission was detected, possibly due to the presence of hydrogen in the silicon nitride material (leading to absorption). Losses in the 2.0 µm to 2.6 µm range are believed to be a consequence of scattering, as the waveguides presented an RMS roughness of ~5 nm. Future work will focus on reducing these sources of absorption and scattering so that operation can be extended to the 4 µm range." @default.
- W2990217811 created "2019-12-05" @default.
- W2990217811 creator A5027918093 @default.
- W2990217811 creator A5031687019 @default.
- W2990217811 creator A5057433873 @default.
- W2990217811 creator A5075431038 @default.
- W2990217811 date "2019-10-01" @default.
- W2990217811 modified "2023-10-16" @default.
- W2990217811 title "Fabrication and characterization of silicon nitride waveguides for mid-infrared applications" @default.
- W2990217811 cites W1972724420 @default.
- W2990217811 cites W1974421866 @default.
- W2990217811 cites W1987128855 @default.
- W2990217811 cites W2002879381 @default.
- W2990217811 cites W2007162687 @default.
- W2990217811 cites W2048246668 @default.
- W2990217811 cites W2298846345 @default.
- W2990217811 cites W2331425463 @default.
- W2990217811 cites W2508218657 @default.
- W2990217811 cites W2552386208 @default.
- W2990217811 cites W2559254288 @default.
- W2990217811 cites W2623643194 @default.
- W2990217811 cites W2766026081 @default.
- W2990217811 cites W2796208085 @default.
- W2990217811 cites W3037464148 @default.
- W2990217811 cites W3123988018 @default.
- W2990217811 doi "https://doi.org/10.1109/sbfoton-iopc.2019.8910236" @default.
- W2990217811 hasPublicationYear "2019" @default.
- W2990217811 type Work @default.
- W2990217811 sameAs 2990217811 @default.
- W2990217811 citedByCount "1" @default.
- W2990217811 countsByYear W29902178112023 @default.
- W2990217811 crossrefType "proceedings-article" @default.
- W2990217811 hasAuthorship W2990217811A5027918093 @default.
- W2990217811 hasAuthorship W2990217811A5031687019 @default.
- W2990217811 hasAuthorship W2990217811A5057433873 @default.
- W2990217811 hasAuthorship W2990217811A5075431038 @default.
- W2990217811 hasConcept C119423029 @default.
- W2990217811 hasConcept C120665830 @default.
- W2990217811 hasConcept C121332964 @default.
- W2990217811 hasConcept C136525101 @default.
- W2990217811 hasConcept C142724271 @default.
- W2990217811 hasConcept C158355884 @default.
- W2990217811 hasConcept C171250308 @default.
- W2990217811 hasConcept C192562407 @default.
- W2990217811 hasConcept C194760766 @default.
- W2990217811 hasConcept C204787440 @default.
- W2990217811 hasConcept C2777431650 @default.
- W2990217811 hasConcept C2779227376 @default.
- W2990217811 hasConcept C2780841128 @default.
- W2990217811 hasConcept C49040817 @default.
- W2990217811 hasConcept C544956773 @default.
- W2990217811 hasConcept C71924100 @default.
- W2990217811 hasConceptScore W2990217811C119423029 @default.
- W2990217811 hasConceptScore W2990217811C120665830 @default.
- W2990217811 hasConceptScore W2990217811C121332964 @default.
- W2990217811 hasConceptScore W2990217811C136525101 @default.
- W2990217811 hasConceptScore W2990217811C142724271 @default.
- W2990217811 hasConceptScore W2990217811C158355884 @default.
- W2990217811 hasConceptScore W2990217811C171250308 @default.
- W2990217811 hasConceptScore W2990217811C192562407 @default.
- W2990217811 hasConceptScore W2990217811C194760766 @default.
- W2990217811 hasConceptScore W2990217811C204787440 @default.
- W2990217811 hasConceptScore W2990217811C2777431650 @default.
- W2990217811 hasConceptScore W2990217811C2779227376 @default.
- W2990217811 hasConceptScore W2990217811C2780841128 @default.
- W2990217811 hasConceptScore W2990217811C49040817 @default.
- W2990217811 hasConceptScore W2990217811C544956773 @default.
- W2990217811 hasConceptScore W2990217811C71924100 @default.
- W2990217811 hasLocation W29902178111 @default.
- W2990217811 hasOpenAccess W2990217811 @default.
- W2990217811 hasPrimaryLocation W29902178111 @default.
- W2990217811 hasRelatedWork W1146819836 @default.
- W2990217811 hasRelatedWork W2002070225 @default.
- W2990217811 hasRelatedWork W2022434681 @default.
- W2990217811 hasRelatedWork W2035430492 @default.
- W2990217811 hasRelatedWork W2066018626 @default.
- W2990217811 hasRelatedWork W2114160525 @default.
- W2990217811 hasRelatedWork W2754462113 @default.
- W2990217811 hasRelatedWork W3039921875 @default.
- W2990217811 hasRelatedWork W3140761358 @default.
- W2990217811 hasRelatedWork W4240308501 @default.
- W2990217811 isParatext "false" @default.
- W2990217811 isRetracted "false" @default.
- W2990217811 magId "2990217811" @default.
- W2990217811 workType "article" @default.