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- W2990286646 abstract "This article presents the optimization and static modeling of the design an integral microelectromechanical switch of capacitive type based on a parametric 3D model using finite element analysis software complex ANSYS. The values of the pull-down voltage and switching time are determined. The obtained results give a good theoretical help in the development of various high-performance electrostatic microelectromechanical switches." @default.
- W2990286646 created "2019-12-05" @default.
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- W2990286646 date "2019-01-01" @default.
- W2990286646 modified "2023-09-23" @default.
- W2990286646 title "The modeling design integral the electrostatic microelectromechanical switch of capacitive type" @default.
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- W2990286646 doi "https://doi.org/10.1051/itmconf/20193006005" @default.
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