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- W2993139634 abstract "Ion-Sensitive Field-Effect Transistors(ISFETs) with LPCVD silicon nitride as a sensitive gate were fabricated on the basis of a CMOS process. The silicon nitride was deposited directly on a poly silicon gate-electrode. Using a specially designed measuring cell, the hydrogen ion sensing properties of the ISFET in liquid could be investigated without any bonding or encapsulation. At first, the sensitivity was estimated by simulations according to the site-binding theory and the experimental results were analysed and compared with simulated results. The measured data were in good agreement with the simulated results. The silicon nitride based ISFET had good linearity evaluated from correlation factor( ≥ 0.9998) and a mean pH-sensitivity of 56.8 mV/pH. The maximum hysteresis width between forward(pH = 3 → pH = 11)- and backward(pH = 11 → pH = 3) titration was 16.7 mV at pH = 6.54." @default.
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- W2993139634 date "1997-06-01" @default.
- W2993139634 modified "2023-09-25" @default.
- W2993139634 title "pH Sensing Properties of ISFETs with LPCVD Silicon Nitride Sensitive-Gate" @default.
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