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• W2993741781 abstract "Nitrogen atoms are versatile for nitridation applications and do not lead to plasma-induced damage. Large-sized wafer processing demands a uniform supply of nitrogen atoms produced in a high-density very-high-frequency excited plasma of N2 without ammonia. The confinement of plasma through the use of a plasma shield plate (PSP) allows the samples to be separated in a downstream chamber. Generation and transport of N atoms were computationally simulated, and the PSP designs were implemented by PSP parameterization. The supply of high-density N radicals to the sample stage was optimally designed with sufficiently small holes and thin PSP to satisfy an aspect ratio of thickness-to-hole-diameter of less than 2.5." @default.
• W2993741781 created "2019-12-13" @default.
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• W2993741781 date "2019-11-01" @default.
• W2993741781 modified "2023-09-23" @default.
• W2993741781 title "Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate" @default.
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• W2993741781 doi "https://doi.org/10.1116/1.5114831" @default.
• W2993741781 hasPublicationYear "2019" @default.
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