Matches in SemOpenAlex for { <https://semopenalex.org/work/W2994334804> ?p ?o ?g. }
Showing items 1 to 63 of
63
with 100 items per page.
- W2994334804 abstract "Semiconductor wafer test requires a stable electrical contact resistance between each individual I/O pad and the probe needle. Due to the strong sensitivity of thin layers of IC’s to mechanical stress, low-force probe cards are mostly used. Those probes face the challenge of a randomly increased and instable electrical contact resistance during continuing insertions, whose root cause is not fully understood yet. Therefore, we firstly validated the contact behavior of a single probe on different pad metal alloys and layer thicknesses with respect to Holm’s theory. We could confirm the force and material dependency of the contact resistance for Au and Al pad metallization’s but we did observe a very strong pad metal thickness influence. Further on we evaluated the effective contact area related to probe tip diameter and surface topography, which has a significant effect on the probability for an increased and instable electrical contact resistance. As proven in high-resolution 3D microscopy strong variances regarding probe tip shape and roughness within a probe card were observed. Based on the experimental findings we could develop an improved model how the roughness and pad material built-up is related to the alpha-spot formation and thus the contact resistance stability." @default.
- W2994334804 created "2019-12-13" @default.
- W2994334804 creator A5022414227 @default.
- W2994334804 creator A5042888795 @default.
- W2994334804 creator A5059325995 @default.
- W2994334804 date "2019-09-01" @default.
- W2994334804 modified "2023-09-24" @default.
- W2994334804 title "An Improved Model of Electrical Contact Resistance of Pad-Probe Interaction during Wafer Test" @default.
- W2994334804 cites W2014057590 @default.
- W2994334804 cites W2042387937 @default.
- W2994334804 cites W2703380450 @default.
- W2994334804 cites W2942437177 @default.
- W2994334804 doi "https://doi.org/10.1109/holm.2019.8923892" @default.
- W2994334804 hasPublicationYear "2019" @default.
- W2994334804 type Work @default.
- W2994334804 sameAs 2994334804 @default.
- W2994334804 citedByCount "3" @default.
- W2994334804 countsByYear W29943348042021 @default.
- W2994334804 countsByYear W29943348042022 @default.
- W2994334804 countsByYear W29943348042023 @default.
- W2994334804 crossrefType "proceedings-article" @default.
- W2994334804 hasAuthorship W2994334804A5022414227 @default.
- W2994334804 hasAuthorship W2994334804A5042888795 @default.
- W2994334804 hasAuthorship W2994334804A5059325995 @default.
- W2994334804 hasConcept C119599485 @default.
- W2994334804 hasConcept C123671423 @default.
- W2994334804 hasConcept C127413603 @default.
- W2994334804 hasConcept C132235601 @default.
- W2994334804 hasConcept C159985019 @default.
- W2994334804 hasConcept C160671074 @default.
- W2994334804 hasConcept C192562407 @default.
- W2994334804 hasConcept C2779227376 @default.
- W2994334804 hasConcept C44445679 @default.
- W2994334804 hasConcept C49040817 @default.
- W2994334804 hasConcept C94857076 @default.
- W2994334804 hasConceptScore W2994334804C119599485 @default.
- W2994334804 hasConceptScore W2994334804C123671423 @default.
- W2994334804 hasConceptScore W2994334804C127413603 @default.
- W2994334804 hasConceptScore W2994334804C132235601 @default.
- W2994334804 hasConceptScore W2994334804C159985019 @default.
- W2994334804 hasConceptScore W2994334804C160671074 @default.
- W2994334804 hasConceptScore W2994334804C192562407 @default.
- W2994334804 hasConceptScore W2994334804C2779227376 @default.
- W2994334804 hasConceptScore W2994334804C44445679 @default.
- W2994334804 hasConceptScore W2994334804C49040817 @default.
- W2994334804 hasConceptScore W2994334804C94857076 @default.
- W2994334804 hasLocation W29943348041 @default.
- W2994334804 hasOpenAccess W2994334804 @default.
- W2994334804 hasPrimaryLocation W29943348041 @default.
- W2994334804 hasRelatedWork W1979963384 @default.
- W2994334804 hasRelatedWork W2044573965 @default.
- W2994334804 hasRelatedWork W2100705312 @default.
- W2994334804 hasRelatedWork W2119984512 @default.
- W2994334804 hasRelatedWork W2165522438 @default.
- W2994334804 hasRelatedWork W2566904840 @default.
- W2994334804 hasRelatedWork W2900524175 @default.
- W2994334804 hasRelatedWork W3217444301 @default.
- W2994334804 hasRelatedWork W4311214751 @default.
- W2994334804 hasRelatedWork W4313171082 @default.
- W2994334804 isParatext "false" @default.
- W2994334804 isRetracted "false" @default.
- W2994334804 magId "2994334804" @default.
- W2994334804 workType "article" @default.