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- W2994409596 abstract "The electrical contacts in metal-metal MEMS switches are normally made from thin (<; 1 μm) metallic film, e.g. (Au). The low contact force in a MEMS device results in a small area for conduction; to increase the area, a composite contact material has been developed. Sputter coated Au, applied to vertically-aligned multi-walled carbon nanotubes, (Au-MWCNT composite), has been shown to increase contact area and extend switching lifetime by orders of magnitude. In this study the Au-MWCNT composite contact is paired with a Au coated hemisphere contact under a contact force of 150 μN, in an In-situ Contact Evolution (ICE) apparatus, to evaluate the durability of the contacts for two DC switching conditions; cold switching, at 4 V, 4 μA, (16 μW) and hot switching at 4 V, 50 mA (200mW). Under cold switching the contacts are shown to maintain a low stable resistance for 4 Billion cycles. The result leads to a re-evaluation of an established fine transfer model, used to predict switching life times." @default.
- W2994409596 created "2019-12-13" @default.
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- W2994409596 date "2019-09-01" @default.
- W2994409596 modified "2023-09-25" @default.
- W2994409596 title "The In-situ Wear of a Hot and Cold Switched Au on Au Coated MWCNT Electrical Contact for a MEMS Switch Application" @default.
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- W2994409596 doi "https://doi.org/10.1109/holm.2019.8923967" @default.
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