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- W2994683308 abstract "This paper shows the approach to significantly reduce the energy dissipation of thin-film piezoelectric-on-silicon (TPoS) micro-electro-mechanical systems (MEMS) resonator by employing a 2D innovative lightweight spider web-shape phononic crystals (PnC) structure. An AlN-on-Si MEMS resonator, which is working at 40 MHz 5th-order width-extensional (WE) resonant mode, is selected to investigate the energy dissipation reduction by the proposed PnC. According to the simulation results, the proposed PnC structure shows a complete acoustic bandgap from 37 MHz to 44 MHz and can significantly reduce the energy loss. Moreover, the anchor loss (Qanc) of the resonator reached 2,090,000 at 40.03 MHz." @default.
- W2994683308 created "2019-12-26" @default.
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- W2994683308 date "2019-10-01" @default.
- W2994683308 modified "2023-09-27" @default.
- W2994683308 title "Spider Web-Shaped Phononic Crystals for Quality Factor Improvement of Piezoelectric-on-Silicon MEMS resonators" @default.
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- W2994683308 doi "https://doi.org/10.1109/ultsym.2019.8926212" @default.
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