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• W2994736979 endingPage "104883" @default.
• W2994736979 startingPage "104883" @default.
• W2994736979 abstract "The chemical mechanical polishing (CMP) of Cu/Co/TaN barrier liner stack of the sub-14nm devices was associated with several challenges, one of which was to screen out the desired slurries formulation. In this paper, the preliminary screening of cobalt (Co) slurries, combined with the orthogonal test method, was reported systematically for the first time. Based on this, the effects of SiO2, H2O2, potassium tartrate, and TT-LYK on the Co removal rates (RRs) were investigated. The corrosion and polishing behavior of the Co in the slurries containing the above additives were investigated by in-situ OCP measurements, potentiodynamic measurements, and polishing experiments. X-ray photoelectron spectroscopy (XPS) measurements were performed to characterize the complexation mechanism between Co and potassium tartrate. It was found that the slurries containing 5 wt% SiO2, 1 wt% H2O2, and 1.2 wt% PT with 900 ppm TT-LYK at pH 9 was a better candidate for Co barrier planarization and effective in minimizing the galvanic corrosion of Co and Cu under Polishing conditions. Finally, Cu/Co/TaN wafers polished with the candidate slurries showed a good RR selectivity. And the atomic force microscopy (AFM) measurements showed excellent post-polish surfaces." @default.
• W2994736979 created "2019-12-26" @default.
• W2994736979 creator A5001815311 @default.
• W2994736979 creator A5017270866 @default.
• W2994736979 creator A5045537572 @default.
• W2994736979 creator A5049612435 @default.
• W2994736979 creator A5051053420 @default.
• W2994736979 creator A5057117256 @default.
• W2994736979 creator A5087936668 @default.
• W2994736979 date "2020-03-01" @default.
• W2994736979 modified "2023-10-14" @default.
• W2994736979 title "Potassium tartrate as a complexing agent for chemical mechanical polishing of Cu/Co/TaN barrier liner stack in H2O2 based alkaline slurries" @default.
• W2994736979 cites W1974999209 @default.
• W2994736979 cites W1979155126 @default.
• W2994736979 cites W1981090962 @default.
• W2994736979 cites W1981510839 @default.
• W2994736979 cites W1999012679 @default.
• W2994736979 cites W2024804031 @default.
• W2994736979 cites W2025966540 @default.
• W2994736979 cites W2027720491 @default.
• W2994736979 cites W2029909970 @default.
• W2994736979 cites W2040212495 @default.
• W2994736979 cites W2048615411 @default.
• W2994736979 cites W2049109292 @default.
• W2994736979 cites W2054996255 @default.
• W2994736979 cites W2057347712 @default.
• W2994736979 cites W2058470281 @default.
• W2994736979 cites W2068306931 @default.
• W2994736979 cites W2084565007 @default.
• W2994736979 cites W2108759916 @default.
• W2994736979 cites W2132647098 @default.
• W2994736979 cites W2133773905 @default.
• W2994736979 cites W2172188109 @default.
• W2994736979 cites W2318451531 @default.
• W2994736979 cites W2467749791 @default.
• W2994736979 cites W2528324308 @default.
• W2994736979 cites W2748600433 @default.
• W2994736979 doi "https://doi.org/10.1016/j.mssp.2019.104883" @default.
• W2994736979 hasPublicationYear "2020" @default.
• W2994736979 type Work @default.
• W2994736979 sameAs 2994736979 @default.
• W2994736979 citedByCount "19" @default.
• W2994736979 countsByYear W29947369792020 @default.
• W2994736979 countsByYear W29947369792021 @default.
• W2994736979 countsByYear W29947369792022 @default.
• W2994736979 countsByYear W29947369792023 @default.
• W2994736979 crossrefType "journal-article" @default.
• W2994736979 hasAuthorship W2994736979A5001815311 @default.
• W2994736979 hasAuthorship W2994736979A5017270866 @default.
• W2994736979 hasAuthorship W2994736979A5045537572 @default.
• W2994736979 hasAuthorship W2994736979A5049612435 @default.
• W2994736979 hasAuthorship W2994736979A5051053420 @default.
• W2994736979 hasAuthorship W2994736979A5057117256 @default.
• W2994736979 hasAuthorship W2994736979A5087936668 @default.
• W2994736979 hasConcept C127413603 @default.
• W2994736979 hasConcept C138113353 @default.
• W2994736979 hasConcept C13965031 @default.
• W2994736979 hasConcept C159985019 @default.
• W2994736979 hasConcept C160671074 @default.
• W2994736979 hasConcept C171250308 @default.
• W2994736979 hasConcept C175708663 @default.
• W2994736979 hasConcept C179104552 @default.
• W2994736979 hasConcept C180088628 @default.
• W2994736979 hasConcept C185592680 @default.
• W2994736979 hasConcept C191897082 @default.
• W2994736979 hasConcept C192562407 @default.
• W2994736979 hasConcept C20625102 @default.
• W2994736979 hasConcept C2777699559 @default.
• W2994736979 hasConcept C42360764 @default.
• W2994736979 hasConcept C94293008 @default.
• W2994736979 hasConceptScore W2994736979C127413603 @default.
• W2994736979 hasConceptScore W2994736979C138113353 @default.
• W2994736979 hasConceptScore W2994736979C13965031 @default.
• W2994736979 hasConceptScore W2994736979C159985019 @default.
• W2994736979 hasConceptScore W2994736979C160671074 @default.
• W2994736979 hasConceptScore W2994736979C171250308 @default.
• W2994736979 hasConceptScore W2994736979C175708663 @default.
• W2994736979 hasConceptScore W2994736979C179104552 @default.
• W2994736979 hasConceptScore W2994736979C180088628 @default.
• W2994736979 hasConceptScore W2994736979C185592680 @default.
• W2994736979 hasConceptScore W2994736979C191897082 @default.
• W2994736979 hasConceptScore W2994736979C192562407 @default.
• W2994736979 hasConceptScore W2994736979C20625102 @default.
• W2994736979 hasConceptScore W2994736979C2777699559 @default.
• W2994736979 hasConceptScore W2994736979C42360764 @default.
• W2994736979 hasConceptScore W2994736979C94293008 @default.
• W2994736979 hasFunder F4320323993 @default.
• W2994736979 hasFunder F4320325370 @default.
• W2994736979 hasLocation W29947369791 @default.
• W2994736979 hasOpenAccess W2994736979 @default.
• W2994736979 hasPrimaryLocation W29947369791 @default.
• W2994736979 hasRelatedWork W2069802457 @default.
• W2994736979 hasRelatedWork W2080565170 @default.
• W2994736979 hasRelatedWork W2106409363 @default.
• W2994736979 hasRelatedWork W2108387096 @default.
• W2994736979 hasRelatedWork W2123982555 @default.
• W2994736979 hasRelatedWork W2132350042 @default.
• W2994736979 hasRelatedWork W2228864619 @default.

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