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- W2994810439 abstract "Particulate matter 2.5 is of great harm to human health. We proposed a novel PM2.5 monitor based on surface acoustic wave (SAW), which mainly consists of a SAW dual-resonator oscillator, a thermophoresis unit, and a virtual impactor. In this paper, the FEM software COMSOL was used to simulate the heating characteristics of the micro-heater fabricated on the quartz substrate with different structures and materials, as well as the thermodeposition distribution of particles under different hot source locations. The response of the PM 2.5 monitor was analyzed by considering the distribution of particles and the sensitivity relation of different areas on the surface of the SAW resonator. In addition, the structure of the SAW based PM2.5 monitor was optimized and designed. Finally, the micro-heater and the SAW resonator were manufactured and bonded to form the detection probe of the PM2.5 monitor, and their performances were verified by experiments." @default.
- W2994810439 created "2019-12-26" @default.
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- W2994810439 date "2019-10-01" @default.
- W2994810439 modified "2023-09-23" @default.
- W2994810439 title "Research on a Surface acoustic wave based PM2.5 monitor" @default.
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- W2994810439 doi "https://doi.org/10.1109/ultsym.2019.8926208" @default.
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