FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2994822918> ?p ?o ?g. }

• W2994822918 abstract "This paper presents a fabrication process of a Poly-Silicon-On-Insulator (PSOI) wafer that can be used as an alternative to conventional Silicon-On-Insulator (SOI) wafers for fabrication of Capacitative Micromachined Ultrasound Transducers (CMUT). The fabrication of PSOI wafers does, unlike the conventional SOI fabrication, not involve any bonding steps. A batch of PSOI wafers having a 400 nm BOX layer and a 2.6 µm ± 0.04 µm (1σ) device layer is fabricated and characterized. A surface roughness of 0.47 nm is measured for the PSOI device layer, and successful fusion bonds (direct bonds) are demonstrated between PSOI wafers and oxidized silicon wafers. A wafer-bonded CMUT using a PSOI wafer is fabricated and electrically characterized, and the expected CMUT performance is observed. Impedance spectra are demonstrated at five different DC biases, the expected spring softening effect is observed when the magnitude of the DC bias is increased." @default.
• W2994822918 created "2019-12-26" @default.
• W2994822918 creator A5018202333 @default.
• W2994822918 creator A5042631584 @default.
• W2994822918 creator A5070430218 @default.
• W2994822918 creator A5079921409 @default.
• W2994822918 creator A5083281543 @default.
• W2994822918 date "2019-10-01" @default.
• W2994822918 modified "2023-09-25" @default.
• W2994822918 title "Wafer bonded CMUT technology utilizing a Poly-Silicon-on-Insulator wafer" @default.
• W2994822918 cites W1495230379 @default.
• W2994822918 cites W1626589084 @default.
• W2994822918 cites W1833017711 @default.
• W2994822918 cites W1967428644 @default.
• W2994822918 cites W1982494793 @default.
• W2994822918 cites W2006465965 @default.
• W2994822918 cites W2032110728 @default.
• W2994822918 cites W2048392237 @default.
• W2994822918 cites W2058583571 @default.
• W2994822918 cites W2105130406 @default.
• W2994822918 cites W2121189261 @default.
• W2994822918 cites W2142915478 @default.
• W2994822918 cites W2147522272 @default.
• W2994822918 cites W2150637132 @default.
• W2994822918 cites W2156690225 @default.
• W2994822918 cites W2164499381 @default.
• W2994822918 cites W2538415792 @default.
• W2994822918 cites W2924987278 @default.
• W2994822918 doi "https://doi.org/10.1109/ultsym.2019.8925931" @default.
• W2994822918 hasPublicationYear "2019" @default.
• W2994822918 type Work @default.
• W2994822918 sameAs 2994822918 @default.
• W2994822918 citedByCount "3" @default.
• W2994822918 countsByYear W29948229182020 @default.
• W2994822918 countsByYear W29948229182021 @default.
• W2994822918 crossrefType "proceedings-article" @default.
• W2994822918 hasAuthorship W2994822918A5018202333 @default.
• W2994822918 hasAuthorship W2994822918A5042631584 @default.
• W2994822918 hasAuthorship W2994822918A5070430218 @default.
• W2994822918 hasAuthorship W2994822918A5079921409 @default.
• W2994822918 hasAuthorship W2994822918A5083281543 @default.
• W2994822918 hasBestOaLocation W29948229182 @default.
• W2994822918 hasConcept C100082104 @default.
• W2994822918 hasConcept C126355924 @default.
• W2994822918 hasConcept C127413603 @default.
• W2994822918 hasConcept C136525101 @default.
• W2994822918 hasConcept C142724271 @default.
• W2994822918 hasConcept C145667562 @default.
• W2994822918 hasConcept C159985019 @default.
• W2994822918 hasConcept C160671074 @default.
• W2994822918 hasConcept C165013422 @default.
• W2994822918 hasConcept C171250308 @default.
• W2994822918 hasConcept C192562407 @default.
• W2994822918 hasConcept C204787440 @default.
• W2994822918 hasConcept C24326235 @default.
• W2994822918 hasConcept C2779133538 @default.
• W2994822918 hasConcept C2779227376 @default.
• W2994822918 hasConcept C37977207 @default.
• W2994822918 hasConcept C49040817 @default.
• W2994822918 hasConcept C53143962 @default.
• W2994822918 hasConcept C544956773 @default.
• W2994822918 hasConcept C58772458 @default.
• W2994822918 hasConcept C71924100 @default.
• W2994822918 hasConceptScore W2994822918C100082104 @default.
• W2994822918 hasConceptScore W2994822918C126355924 @default.
• W2994822918 hasConceptScore W2994822918C127413603 @default.
• W2994822918 hasConceptScore W2994822918C136525101 @default.
• W2994822918 hasConceptScore W2994822918C142724271 @default.
• W2994822918 hasConceptScore W2994822918C145667562 @default.
• W2994822918 hasConceptScore W2994822918C159985019 @default.
• W2994822918 hasConceptScore W2994822918C160671074 @default.
• W2994822918 hasConceptScore W2994822918C165013422 @default.
• W2994822918 hasConceptScore W2994822918C171250308 @default.
• W2994822918 hasConceptScore W2994822918C192562407 @default.
• W2994822918 hasConceptScore W2994822918C204787440 @default.
• W2994822918 hasConceptScore W2994822918C24326235 @default.
• W2994822918 hasConceptScore W2994822918C2779133538 @default.
• W2994822918 hasConceptScore W2994822918C2779227376 @default.
• W2994822918 hasConceptScore W2994822918C37977207 @default.
• W2994822918 hasConceptScore W2994822918C49040817 @default.
• W2994822918 hasConceptScore W2994822918C53143962 @default.
• W2994822918 hasConceptScore W2994822918C544956773 @default.
• W2994822918 hasConceptScore W2994822918C58772458 @default.
• W2994822918 hasConceptScore W2994822918C71924100 @default.
• W2994822918 hasLocation W29948229181 @default.
• W2994822918 hasLocation W29948229182 @default.
• W2994822918 hasOpenAccess W2994822918 @default.
• W2994822918 hasPrimaryLocation W29948229181 @default.
• W2994822918 hasRelatedWork W1536397480 @default.
• W2994822918 hasRelatedWork W2028250094 @default.
• W2994822918 hasRelatedWork W2040491154 @default.
• W2994822918 hasRelatedWork W2053520333 @default.
• W2994822918 hasRelatedWork W2089703642 @default.
• W2994822918 hasRelatedWork W2127455146 @default.
• W2994822918 hasRelatedWork W2158008759 @default.
• W2994822918 hasRelatedWork W2171956588 @default.
• W2994822918 hasRelatedWork W2994822918 @default.
• W2994822918 hasRelatedWork W3086541439 @default.
• W2994822918 isParatext "false" @default.
• W2994822918 isRetracted "false" @default.

• next