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- W2994983656 abstract "Acoustic wave sensors, particularly surface acoustic wave (SAW) devices, have been one of the most studied options for high temperature applications. Although they present the big advantage of simple wireless interrogation, they also have disadvantages. These disadvantages include the destructive agglomeration of their metallic thin electrodes. To overcome these issues, AlN-based solidly mounted resonators (SMRs) appear as promising alternatives. Our previous studies have shown they sustain temperatures as high as 1000oC, however their in-situ performance at high temperature during a long period of time has not been performed yet. With this work we continue our previous investigations and we test in real time the performance of SMRs at 400oC during 7 hours." @default.
- W2994983656 created "2019-12-26" @default.
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- W2994983656 date "2019-10-01" @default.
- W2994983656 modified "2023-10-03" @default.
- W2994983656 title "AlN-based solidly mounted resonators at 400ºC: in-situ performance monitoring" @default.
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- W2994983656 doi "https://doi.org/10.1109/ultsym.2019.8925697" @default.
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