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- W2995547420 abstract "In this paper, a novel modified silicon micromachining process is proposed to design high radiation efficiency antennas from microwave to terahertz band. By utilizing the proposed process, the air-filled structures can be introduced to mitigate the dielectric loss. As an example, slot antenna array is presented by periodically adding blocking structures to suppress the opposite fringing electric field of transmission line. The antenna array is fabricated using the proposed near-zero dielectric loss process and tested. The results show that by using the proposed process, the radiation efficiency is up to 90% even in terahertz band, much higher than conventional silicon process, i.e., 30%~40%. Moreover, considering the silicon MEMS process, the achieved antennas are with potential in system-on-chip applications." @default.
- W2995547420 created "2019-12-26" @default.
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- W2995547420 date "2019-05-01" @default.
- W2995547420 modified "2023-09-26" @default.
- W2995547420 title "A Novel Modified Silicon Micromachining Process with Near-Zero Dielectric Loss for High-Efficiency Antenna Design up to Terahertz Band" @default.
- W2995547420 cites W1955509249 @default.
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- W2995547420 doi "https://doi.org/10.23919/ursi-emts.2019.8931522" @default.
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