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- W2995596231 abstract "Acousto-optic modulation at GHz frequencies is demonstrated in water in a microfluidic channel. The photoelastic effect in water is induced by a silicon based GHz bulk acoustic wave aluminum nitride transducer placed in a Fresnel lens configuration. The planar GHz ultrasonic transducer is fabricated with a CMOS compatible process with no thin-film release step enabling easier integration with CMOS and microfluidics. A UHF vibrometer which is sensitive to changes in the refractive index along the laser path is used to measure the peak surface displacement. The peak refractive index change was determined to be O(10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-6</sup> ), when 1.08GHz RF drive voltages between 1Vp and 5Vp were applied to the focusing transducer. Peak phase modulation of 6mrad was determined from the experimental results for 5Vp RF drive signal. The total modulator area of such a system is 0.086 mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . This result provides a framework to implement CMOS integrated acousto-optic modulator arrays." @default.
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- W2995596231 date "2019-10-01" @default.
- W2995596231 modified "2023-10-14" @default.
- W2995596231 title "Acousto-Optic Modulation of Water in a Microfluidic Channel Using Planar Fresnel Type GHz Ultrasonic Transducer" @default.
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- W2995596231 doi "https://doi.org/10.1109/ultsym.2019.8925614" @default.
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