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- W2997029077 abstract "In this letter, we report on the demonstration of a Mg-doped GaN/Al0.2Ga0.8N superlattice (SL) based depletion mode p-channel FinFET to improve the on current (ION). A two-step approach involving a dry etch followed by a Tetramethylammonium hydroxide (TMAH) wet etch was employed to obtain fins with minimum width of 50 nm using optical lithography. Normalizing current with fin height, an ION of 52 mA/mm and 110 mA/mm were achieved for 80 and 105 nm wide fins respectively." @default.
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- W2997029077 date "2020-02-01" @default.
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- W2997029077 title "Demonstration of a GaN/AlGaN Superlattice-Based p-Channel FinFET With High ON-Current" @default.
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- W2997029077 doi "https://doi.org/10.1109/led.2019.2963428" @default.
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