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- W2997239307 endingPage "198" @default.
- W2997239307 startingPage "95" @default.
- W2997239307 abstract "The techniques in surface metrology with the largest diversity are based on electrodynamics, more precise on the interaction of electromagnetic waves with the surface of the workpiece. State-of-the-art camera technology, proper attention to the internal optical design, light sources, and computing capabilities have led to impressive optical metrology systems with considerable specifications. The most relevant techniques are discussed in the following Sects. 5.1, 5.2, 5.3, 5.4, 5.5, 5.6, 5.7, 5.8, 5.9, and 5.10." @default.
- W2997239307 created "2020-01-10" @default.
- W2997239307 creator A5049461767 @default.
- W2997239307 date "2019-01-01" @default.
- W2997239307 modified "2023-09-24" @default.
- W2997239307 title "Optical Surface Metrology: Methods" @default.
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