Matches in SemOpenAlex for { <https://semopenalex.org/work/W2998221580> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2998221580 abstract "In this contribution, we demonstrate the deposition of low loss, CMOS-compatible SiN thin-films using plasma beam assisted reactive sputtering for photonic integrated circuits. Plasma beam assistance during the deposition process enabled us to achieve thin-film losses of below 0.1 dB/cm and a surface roughness of Rq of <0.1 nm, while keeping the processing temperatures below 400°C. Propagation losses of 0.9 dB/cm at 1550 nm have been achieved for waveguides with a cross section of 460× 2000 nm (height × width)." @default.
- W2998221580 created "2020-01-10" @default.
- W2998221580 creator A5004914333 @default.
- W2998221580 creator A5008205233 @default.
- W2998221580 creator A5054280799 @default.
- W2998221580 creator A5056765538 @default.
- W2998221580 creator A5061164601 @default.
- W2998221580 creator A5067998474 @default.
- W2998221580 date "2019-12-30" @default.
- W2998221580 modified "2023-09-25" @default.
- W2998221580 title "CMOS-compatible, plasma beam assisted reactive magnetron sputtered silicon nitride films for photonic integrated circuits" @default.
- W2998221580 cites W2051234647 @default.
- W2998221580 cites W2143394828 @default.
- W2998221580 cites W2273038416 @default.
- W2998221580 cites W2529995943 @default.
- W2998221580 doi "https://doi.org/10.1117/12.2541269" @default.
- W2998221580 hasPublicationYear "2019" @default.
- W2998221580 type Work @default.
- W2998221580 sameAs 2998221580 @default.
- W2998221580 citedByCount "0" @default.
- W2998221580 crossrefType "proceedings-article" @default.
- W2998221580 hasAuthorship W2998221580A5004914333 @default.
- W2998221580 hasAuthorship W2998221580A5008205233 @default.
- W2998221580 hasAuthorship W2998221580A5054280799 @default.
- W2998221580 hasAuthorship W2998221580A5056765538 @default.
- W2998221580 hasAuthorship W2998221580A5061164601 @default.
- W2998221580 hasAuthorship W2998221580A5067998474 @default.
- W2998221580 hasConcept C119599485 @default.
- W2998221580 hasConcept C121332964 @default.
- W2998221580 hasConcept C123408415 @default.
- W2998221580 hasConcept C127413603 @default.
- W2998221580 hasConcept C134146338 @default.
- W2998221580 hasConcept C171250308 @default.
- W2998221580 hasConcept C19067145 @default.
- W2998221580 hasConcept C192562407 @default.
- W2998221580 hasConcept C194760766 @default.
- W2998221580 hasConcept C20788544 @default.
- W2998221580 hasConcept C22423302 @default.
- W2998221580 hasConcept C22799297 @default.
- W2998221580 hasConcept C2777431650 @default.
- W2998221580 hasConcept C2779227376 @default.
- W2998221580 hasConcept C46362747 @default.
- W2998221580 hasConcept C49040817 @default.
- W2998221580 hasConcept C544956773 @default.
- W2998221580 hasConcept C62520636 @default.
- W2998221580 hasConcept C82706917 @default.
- W2998221580 hasConceptScore W2998221580C119599485 @default.
- W2998221580 hasConceptScore W2998221580C121332964 @default.
- W2998221580 hasConceptScore W2998221580C123408415 @default.
- W2998221580 hasConceptScore W2998221580C127413603 @default.
- W2998221580 hasConceptScore W2998221580C134146338 @default.
- W2998221580 hasConceptScore W2998221580C171250308 @default.
- W2998221580 hasConceptScore W2998221580C19067145 @default.
- W2998221580 hasConceptScore W2998221580C192562407 @default.
- W2998221580 hasConceptScore W2998221580C194760766 @default.
- W2998221580 hasConceptScore W2998221580C20788544 @default.
- W2998221580 hasConceptScore W2998221580C22423302 @default.
- W2998221580 hasConceptScore W2998221580C22799297 @default.
- W2998221580 hasConceptScore W2998221580C2777431650 @default.
- W2998221580 hasConceptScore W2998221580C2779227376 @default.
- W2998221580 hasConceptScore W2998221580C46362747 @default.
- W2998221580 hasConceptScore W2998221580C49040817 @default.
- W2998221580 hasConceptScore W2998221580C544956773 @default.
- W2998221580 hasConceptScore W2998221580C62520636 @default.
- W2998221580 hasConceptScore W2998221580C82706917 @default.
- W2998221580 hasLocation W29982215801 @default.
- W2998221580 hasOpenAccess W2998221580 @default.
- W2998221580 hasPrimaryLocation W29982215801 @default.
- W2998221580 hasRelatedWork W2101623548 @default.
- W2998221580 hasRelatedWork W2132276428 @default.
- W2998221580 hasRelatedWork W2560640546 @default.
- W2998221580 hasRelatedWork W2751384015 @default.
- W2998221580 hasRelatedWork W2774135869 @default.
- W2998221580 hasRelatedWork W3014026528 @default.
- W2998221580 hasRelatedWork W3191322004 @default.
- W2998221580 hasRelatedWork W4289826499 @default.
- W2998221580 hasRelatedWork W4290714492 @default.
- W2998221580 hasRelatedWork W4307566820 @default.
- W2998221580 isParatext "false" @default.
- W2998221580 isRetracted "false" @default.
- W2998221580 magId "2998221580" @default.
- W2998221580 workType "article" @default.