Matches in SemOpenAlex for { <https://semopenalex.org/work/W2999009076> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2999009076 abstract "In this paper, we report an atomic layer deposited (ALD) zirconium oxide-based micro humidity sensor. The sensor comprises of a pair of interdigital platinum electrodes on a silicon substrate and a humidity sensing film (ZrO2) coated on the electrodes. The atomic layer deposition technique is utilized to conformally coat 42 nm thick zirconium oxide on 410 nm thick electrodes to increase the surface area of the sensing film. The sensor is tested under various humidity levels. It is evident from experimental results that the impedance of the sensor decreases with increase in relative humidity. Furthermore, the sensor is highly sensitive to humidity at the low frequency of the applied signal. At 20 Hz frequency when relative humidity is varied from 0.1% to 92%, the impedance of the sensor decreased from 143.46 MΩ to 62.04 kΩ with a net change in impedance of about 2,312 times, which is much higher than most of the reported zirconium oxide based humidity sensors." @default.
- W2999009076 created "2020-01-23" @default.
- W2999009076 creator A5045896022 @default.
- W2999009076 creator A5047641158 @default.
- W2999009076 creator A5062832697 @default.
- W2999009076 creator A5088620566 @default.
- W2999009076 date "2019-10-01" @default.
- W2999009076 modified "2023-10-01" @default.
- W2999009076 title "Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications" @default.
- W2999009076 cites W1972422923 @default.
- W2999009076 cites W2007973004 @default.
- W2999009076 cites W2017728589 @default.
- W2999009076 cites W2017886392 @default.
- W2999009076 cites W2049002154 @default.
- W2999009076 cites W2061091486 @default.
- W2999009076 cites W2089148007 @default.
- W2999009076 cites W2155340892 @default.
- W2999009076 cites W2165091860 @default.
- W2999009076 cites W2300344163 @default.
- W2999009076 cites W2330205191 @default.
- W2999009076 cites W2334278430 @default.
- W2999009076 cites W2792346646 @default.
- W2999009076 cites W2801858147 @default.
- W2999009076 cites W2906973653 @default.
- W2999009076 doi "https://doi.org/10.1109/sensors43011.2019.8956489" @default.
- W2999009076 hasPublicationYear "2019" @default.
- W2999009076 type Work @default.
- W2999009076 sameAs 2999009076 @default.
- W2999009076 citedByCount "2" @default.
- W2999009076 countsByYear W29990090762020 @default.
- W2999009076 countsByYear W29990090762021 @default.
- W2999009076 crossrefType "proceedings-article" @default.
- W2999009076 hasAuthorship W2999009076A5045896022 @default.
- W2999009076 hasAuthorship W2999009076A5047641158 @default.
- W2999009076 hasAuthorship W2999009076A5062832697 @default.
- W2999009076 hasAuthorship W2999009076A5088620566 @default.
- W2999009076 hasConcept C111368507 @default.
- W2999009076 hasConcept C119599485 @default.
- W2999009076 hasConcept C121332964 @default.
- W2999009076 hasConcept C127313418 @default.
- W2999009076 hasConcept C127413603 @default.
- W2999009076 hasConcept C147789679 @default.
- W2999009076 hasConcept C151420433 @default.
- W2999009076 hasConcept C158960510 @default.
- W2999009076 hasConcept C159985019 @default.
- W2999009076 hasConcept C17525397 @default.
- W2999009076 hasConcept C17829176 @default.
- W2999009076 hasConcept C185592680 @default.
- W2999009076 hasConcept C191897082 @default.
- W2999009076 hasConcept C192562407 @default.
- W2999009076 hasConcept C2777289219 @default.
- W2999009076 hasConcept C2779227376 @default.
- W2999009076 hasConcept C2779851234 @default.
- W2999009076 hasConcept C49040817 @default.
- W2999009076 hasConcept C534791751 @default.
- W2999009076 hasConcept C544956773 @default.
- W2999009076 hasConcept C69544855 @default.
- W2999009076 hasConcept C97355855 @default.
- W2999009076 hasConceptScore W2999009076C111368507 @default.
- W2999009076 hasConceptScore W2999009076C119599485 @default.
- W2999009076 hasConceptScore W2999009076C121332964 @default.
- W2999009076 hasConceptScore W2999009076C127313418 @default.
- W2999009076 hasConceptScore W2999009076C127413603 @default.
- W2999009076 hasConceptScore W2999009076C147789679 @default.
- W2999009076 hasConceptScore W2999009076C151420433 @default.
- W2999009076 hasConceptScore W2999009076C158960510 @default.
- W2999009076 hasConceptScore W2999009076C159985019 @default.
- W2999009076 hasConceptScore W2999009076C17525397 @default.
- W2999009076 hasConceptScore W2999009076C17829176 @default.
- W2999009076 hasConceptScore W2999009076C185592680 @default.
- W2999009076 hasConceptScore W2999009076C191897082 @default.
- W2999009076 hasConceptScore W2999009076C192562407 @default.
- W2999009076 hasConceptScore W2999009076C2777289219 @default.
- W2999009076 hasConceptScore W2999009076C2779227376 @default.
- W2999009076 hasConceptScore W2999009076C2779851234 @default.
- W2999009076 hasConceptScore W2999009076C49040817 @default.
- W2999009076 hasConceptScore W2999009076C534791751 @default.
- W2999009076 hasConceptScore W2999009076C544956773 @default.
- W2999009076 hasConceptScore W2999009076C69544855 @default.
- W2999009076 hasConceptScore W2999009076C97355855 @default.
- W2999009076 hasLocation W29990090761 @default.
- W2999009076 hasOpenAccess W2999009076 @default.
- W2999009076 hasPrimaryLocation W29990090761 @default.
- W2999009076 hasRelatedWork W1987099292 @default.
- W2999009076 hasRelatedWork W1990306124 @default.
- W2999009076 hasRelatedWork W2075430071 @default.
- W2999009076 hasRelatedWork W2078939390 @default.
- W2999009076 hasRelatedWork W2084181803 @default.
- W2999009076 hasRelatedWork W2107515185 @default.
- W2999009076 hasRelatedWork W2413353218 @default.
- W2999009076 hasRelatedWork W2625150812 @default.
- W2999009076 hasRelatedWork W2964134545 @default.
- W2999009076 hasRelatedWork W3086649970 @default.
- W2999009076 isParatext "false" @default.
- W2999009076 isRetracted "false" @default.
- W2999009076 magId "2999009076" @default.
- W2999009076 workType "article" @default.