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- W2999453887 abstract "Flexible Hybrid Systems-in-Foil (HySiF) allow the combination of large-area thin-film electronics with ultrathin, high performance silicon chips. Monitoring and determining the long-term reliability, and robustness, especially for biomedical application, is crucial. Biocompatible materials such as polyimides and noble metals are required, in order to prevent from side effects and to reduce the risk of rejection reactions. Based on the previously published data from our group, the scope of this work is to present the ongoing improvements of the process using a low stress polyamic acid based polyimide. The advantage over other organic materials is its low thermal expansion coefficient (CTE), which is close to that of silicon, resulting in reduced stress in the system, particularly, during the manufacturing process. However, unlike benzocylobutene based polymers, polyimide PI2611 shows poor planarizing behavior, leading to more inhomogeneous substrate layers and thus, affecting process steps, such as, photolithography, silicon chip embedding, metal etching, via opening and, direct laser writing, especially in terms of accuracy. To address those issues, we have investigated the homogeneity of multiple polymer layers using both spectroscopic reflectometry and surface profilometry. Based on a fabricated HySiF demonstrator, the crucial process steps are discussed and the reliability of the system is verified by thorough measurements under biological conditions." @default.
- W2999453887 created "2020-01-23" @default.
- W2999453887 creator A5057256675 @default.
- W2999453887 creator A5065276047 @default.
- W2999453887 creator A5074267030 @default.
- W2999453887 creator A5088891418 @default.
- W2999453887 date "2019-09-01" @default.
- W2999453887 modified "2023-09-25" @default.
- W2999453887 title "Hybrid Systems-in-Foil (HySiF) – Low Stress CFP Process for Biomedical Application" @default.
- W2999453887 cites W157852784 @default.
- W2999453887 cites W2010093541 @default.
- W2999453887 cites W2273616533 @default.
- W2999453887 cites W2625335429 @default.
- W2999453887 cites W2801164164 @default.
- W2999453887 doi "https://doi.org/10.23919/empc44848.2019.8951841" @default.
- W2999453887 hasPublicationYear "2019" @default.
- W2999453887 type Work @default.
- W2999453887 sameAs 2999453887 @default.
- W2999453887 citedByCount "1" @default.
- W2999453887 countsByYear W29994538872020 @default.
- W2999453887 crossrefType "proceedings-article" @default.
- W2999453887 hasAuthorship W2999453887A5057256675 @default.
- W2999453887 hasAuthorship W2999453887A5065276047 @default.
- W2999453887 hasAuthorship W2999453887A5074267030 @default.
- W2999453887 hasAuthorship W2999453887A5088891418 @default.
- W2999453887 hasConcept C103824480 @default.
- W2999453887 hasConcept C105487726 @default.
- W2999453887 hasConcept C171250308 @default.
- W2999453887 hasConcept C192562407 @default.
- W2999453887 hasConcept C2778925768 @default.
- W2999453887 hasConcept C2779227376 @default.
- W2999453887 hasConcept C2780965675 @default.
- W2999453887 hasConcept C31972630 @default.
- W2999453887 hasConcept C41008148 @default.
- W2999453887 hasConcept C49040817 @default.
- W2999453887 hasConcept C544956773 @default.
- W2999453887 hasConceptScore W2999453887C103824480 @default.
- W2999453887 hasConceptScore W2999453887C105487726 @default.
- W2999453887 hasConceptScore W2999453887C171250308 @default.
- W2999453887 hasConceptScore W2999453887C192562407 @default.
- W2999453887 hasConceptScore W2999453887C2778925768 @default.
- W2999453887 hasConceptScore W2999453887C2779227376 @default.
- W2999453887 hasConceptScore W2999453887C2780965675 @default.
- W2999453887 hasConceptScore W2999453887C31972630 @default.
- W2999453887 hasConceptScore W2999453887C41008148 @default.
- W2999453887 hasConceptScore W2999453887C49040817 @default.
- W2999453887 hasConceptScore W2999453887C544956773 @default.
- W2999453887 hasLocation W29994538871 @default.
- W2999453887 hasOpenAccess W2999453887 @default.
- W2999453887 hasPrimaryLocation W29994538871 @default.
- W2999453887 hasRelatedWork W142904851 @default.
- W2999453887 hasRelatedWork W1873756990 @default.
- W2999453887 hasRelatedWork W2029707571 @default.
- W2999453887 hasRelatedWork W2047629864 @default.
- W2999453887 hasRelatedWork W2074219910 @default.
- W2999453887 hasRelatedWork W2091644118 @default.
- W2999453887 hasRelatedWork W2102014162 @default.
- W2999453887 hasRelatedWork W2120834967 @default.
- W2999453887 hasRelatedWork W2151701782 @default.
- W2999453887 hasRelatedWork W2154341184 @default.
- W2999453887 hasRelatedWork W2325738120 @default.
- W2999453887 hasRelatedWork W2564312135 @default.
- W2999453887 hasRelatedWork W2609581333 @default.
- W2999453887 hasRelatedWork W2997624991 @default.
- W2999453887 hasRelatedWork W3138815322 @default.
- W2999453887 hasRelatedWork W3159494788 @default.
- W2999453887 hasRelatedWork W3165312705 @default.
- W2999453887 hasRelatedWork W3211961280 @default.
- W2999453887 hasRelatedWork W1902365356 @default.
- W2999453887 hasRelatedWork W2094205841 @default.
- W2999453887 isParatext "false" @default.
- W2999453887 isRetracted "false" @default.
- W2999453887 magId "2999453887" @default.
- W2999453887 workType "article" @default.