FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3000047190> ?p ?o ?g. }

• W3000047190 endingPage "038102" @default.
• W3000047190 startingPage "038102" @default.
• W3000047190 abstract "Hafnium disulfide (HfS 2 ) is a promising two-dimensional material for scaling electronic devices due to its higher carrier mobility, in which the combination of two-dimensional materials with traditional semiconductors in the framework of CMOS-compatible technology is necessary. We reported on the deposition of HfS 2 nanocrystals by remote plasma enhanced atomic layer deposition at low temperature using Hf(N(CH 3 )(C 2 H 5 )) 4 and H 2 S as the reaction precursors. Self-limiting reaction behavior was observed at the deposition temperatures ranging from 150 °C to 350 °C, and the film thickness increased linearly with the growth cycles. The uniform HfS 2 nanocrystal thin films were obtained with the size of nanocrystal grain up to 27 nm. It was demonstrated that higher deposition temperature could enlarge the grain size and improve the HfS 2 crystallinity, while causing crystallization of the mixed HfO 2 above 450 °C. These results suggested that atomic layer deposition is a low-temperature route to synthesize high quality HfS 2 nanocrystals for electronic device or electrochemical applications." @default.
• W3000047190 created "2020-01-23" @default.
• W3000047190 creator A5001763316 @default.
• W3000047190 creator A5005232293 @default.
• W3000047190 creator A5022598327 @default.
• W3000047190 creator A5027491601 @default.
• W3000047190 creator A5031727576 @default.
• W3000047190 creator A5052874326 @default.
• W3000047190 creator A5058136899 @default.
• W3000047190 creator A5070079756 @default.
• W3000047190 date "2020-02-01" @default.
• W3000047190 modified "2023-09-27" @default.
• W3000047190 title "Low-temperature plasma enhanced atomic layer deposition of large area HfS₂ nanocrystal thin films*" @default.
• W3000047190 cites W2024966938 @default.
• W3000047190 cites W2041433059 @default.
• W3000047190 cites W2087874647 @default.
• W3000047190 cites W2115786064 @default.
• W3000047190 cites W2162514955 @default.
• W3000047190 cites W2233615618 @default.
• W3000047190 cites W2274227511 @default.
• W3000047190 cites W2319924123 @default.
• W3000047190 cites W2523843102 @default.
• W3000047190 cites W2560867639 @default.
• W3000047190 cites W2568442922 @default.
• W3000047190 cites W2570166109 @default.
• W3000047190 cites W2575066880 @default.
• W3000047190 cites W2580594688 @default.
• W3000047190 cites W2627001981 @default.
• W3000047190 cites W2647043856 @default.
• W3000047190 cites W2741748594 @default.
• W3000047190 cites W2749062927 @default.
• W3000047190 cites W2769352160 @default.
• W3000047190 cites W2770171034 @default.
• W3000047190 cites W2772715861 @default.
• W3000047190 cites W2804854576 @default.
• W3000047190 cites W2886263616 @default.
• W3000047190 cites W2886623906 @default.
• W3000047190 cites W2888618849 @default.
• W3000047190 cites W2890644295 @default.
• W3000047190 cites W2894102499 @default.
• W3000047190 cites W2899739665 @default.
• W3000047190 cites W2900281364 @default.
• W3000047190 cites W2918098583 @default.
• W3000047190 cites W2965227234 @default.
• W3000047190 cites W2967931369 @default.
• W3000047190 cites W2981280828 @default.
• W3000047190 cites W3102234477 @default.
• W3000047190 cites W4245850027 @default.
• W3000047190 doi "https://doi.org/10.1088/1674-1056/ab6c4a" @default.
• W3000047190 hasPublicationYear "2020" @default.
• W3000047190 type Work @default.
• W3000047190 sameAs 3000047190 @default.
• W3000047190 citedByCount "7" @default.
• W3000047190 countsByYear W30000471902020 @default.
• W3000047190 countsByYear W30000471902021 @default.
• W3000047190 countsByYear W30000471902022 @default.
• W3000047190 countsByYear W30000471902023 @default.
• W3000047190 crossrefType "journal-article" @default.
• W3000047190 hasAuthorship W3000047190A5001763316 @default.
• W3000047190 hasAuthorship W3000047190A5005232293 @default.
• W3000047190 hasAuthorship W3000047190A5022598327 @default.
• W3000047190 hasAuthorship W3000047190A5027491601 @default.
• W3000047190 hasAuthorship W3000047190A5031727576 @default.
• W3000047190 hasAuthorship W3000047190A5052874326 @default.
• W3000047190 hasAuthorship W3000047190A5058136899 @default.
• W3000047190 hasAuthorship W3000047190A5070079756 @default.
• W3000047190 hasConcept C113196181 @default.
• W3000047190 hasConcept C127413603 @default.
• W3000047190 hasConcept C151730666 @default.
• W3000047190 hasConcept C159985019 @default.
• W3000047190 hasConcept C171250308 @default.
• W3000047190 hasConcept C175854130 @default.
• W3000047190 hasConcept C185592680 @default.
• W3000047190 hasConcept C19067145 @default.
• W3000047190 hasConcept C192191005 @default.
• W3000047190 hasConcept C192562407 @default.
• W3000047190 hasConcept C203036418 @default.
• W3000047190 hasConcept C2779227376 @default.
• W3000047190 hasConcept C2816523 @default.
• W3000047190 hasConcept C42360764 @default.
• W3000047190 hasConcept C43617362 @default.
• W3000047190 hasConcept C46275449 @default.
• W3000047190 hasConcept C49040817 @default.
• W3000047190 hasConcept C64297162 @default.
• W3000047190 hasConcept C69544855 @default.
• W3000047190 hasConcept C86803240 @default.
• W3000047190 hasConceptScore W3000047190C113196181 @default.
• W3000047190 hasConceptScore W3000047190C127413603 @default.
• W3000047190 hasConceptScore W3000047190C151730666 @default.
• W3000047190 hasConceptScore W3000047190C159985019 @default.
• W3000047190 hasConceptScore W3000047190C171250308 @default.
• W3000047190 hasConceptScore W3000047190C175854130 @default.
• W3000047190 hasConceptScore W3000047190C185592680 @default.
• W3000047190 hasConceptScore W3000047190C19067145 @default.
• W3000047190 hasConceptScore W3000047190C192191005 @default.
• W3000047190 hasConceptScore W3000047190C192562407 @default.
• W3000047190 hasConceptScore W3000047190C203036418 @default.
• W3000047190 hasConceptScore W3000047190C2779227376 @default.

• next