Matches in SemOpenAlex for { <https://semopenalex.org/work/W3000241520> ?p ?o ?g. }
- W3000241520 endingPage "213" @default.
- W3000241520 startingPage "202" @default.
- W3000241520 abstract "A method that allows the investigation of discharge transport mechanism in dielectric films used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is presented. The method is based on monitoring the dielectric film surface or MIM top electrode potential decay rate and the dependence of conductivity on surface potential. The method has been applied in MEMS and MIMs with simultaneously deposited dielectric film to confirm the closeness of transport data in MIM and MEMS devices. The impact of non-uniform charging on local discharge rate and different dielectric film stoichiometry has been also assessed. Finally, the effect of surface leakage due to environment humidity has been also investigated. [2019-0159]." @default.
- W3000241520 created "2020-01-23" @default.
- W3000241520 creator A5000674196 @default.
- W3000241520 creator A5011638349 @default.
- W3000241520 creator A5022400356 @default.
- W3000241520 creator A5055067005 @default.
- W3000241520 creator A5089082485 @default.
- W3000241520 date "2020-04-01" @default.
- W3000241520 modified "2023-10-06" @default.
- W3000241520 title "On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches" @default.
- W3000241520 cites W1602094415 @default.
- W3000241520 cites W1925012551 @default.
- W3000241520 cites W1964536089 @default.
- W3000241520 cites W1964648988 @default.
- W3000241520 cites W1987337467 @default.
- W3000241520 cites W1996721369 @default.
- W3000241520 cites W1998991737 @default.
- W3000241520 cites W2000044773 @default.
- W3000241520 cites W2000490609 @default.
- W3000241520 cites W2001486045 @default.
- W3000241520 cites W2004551015 @default.
- W3000241520 cites W2007056251 @default.
- W3000241520 cites W2007913015 @default.
- W3000241520 cites W2015129308 @default.
- W3000241520 cites W2017931697 @default.
- W3000241520 cites W2026871302 @default.
- W3000241520 cites W2031958908 @default.
- W3000241520 cites W2034248928 @default.
- W3000241520 cites W2036522559 @default.
- W3000241520 cites W2048908512 @default.
- W3000241520 cites W2049247841 @default.
- W3000241520 cites W2051206047 @default.
- W3000241520 cites W2063287864 @default.
- W3000241520 cites W2066707432 @default.
- W3000241520 cites W2069837666 @default.
- W3000241520 cites W2075530161 @default.
- W3000241520 cites W2075705444 @default.
- W3000241520 cites W2078532863 @default.
- W3000241520 cites W2080578484 @default.
- W3000241520 cites W2080802337 @default.
- W3000241520 cites W2087247591 @default.
- W3000241520 cites W2090855274 @default.
- W3000241520 cites W2091301464 @default.
- W3000241520 cites W2092447637 @default.
- W3000241520 cites W2094433804 @default.
- W3000241520 cites W2094766665 @default.
- W3000241520 cites W2108914785 @default.
- W3000241520 cites W2110850727 @default.
- W3000241520 cites W2111397230 @default.
- W3000241520 cites W2112787627 @default.
- W3000241520 cites W2114746730 @default.
- W3000241520 cites W2114953891 @default.
- W3000241520 cites W2120356916 @default.
- W3000241520 cites W2123380686 @default.
- W3000241520 cites W2128640706 @default.
- W3000241520 cites W2150239883 @default.
- W3000241520 cites W2152872206 @default.
- W3000241520 cites W2159237362 @default.
- W3000241520 cites W2167286318 @default.
- W3000241520 cites W2169283599 @default.
- W3000241520 cites W2294602263 @default.
- W3000241520 cites W2540196821 @default.
- W3000241520 cites W2554963620 @default.
- W3000241520 cites W2734427311 @default.
- W3000241520 cites W4237113466 @default.
- W3000241520 cites W620070545 @default.
- W3000241520 cites W750805378 @default.
- W3000241520 doi "https://doi.org/10.1109/jmems.2019.2962068" @default.
- W3000241520 hasPublicationYear "2020" @default.
- W3000241520 type Work @default.
- W3000241520 sameAs 3000241520 @default.
- W3000241520 citedByCount "10" @default.
- W3000241520 countsByYear W30002415202020 @default.
- W3000241520 countsByYear W30002415202021 @default.
- W3000241520 countsByYear W30002415202022 @default.
- W3000241520 crossrefType "journal-article" @default.
- W3000241520 hasAuthorship W3000241520A5000674196 @default.
- W3000241520 hasAuthorship W3000241520A5011638349 @default.
- W3000241520 hasAuthorship W3000241520A5022400356 @default.
- W3000241520 hasAuthorship W3000241520A5055067005 @default.
- W3000241520 hasAuthorship W3000241520A5089082485 @default.
- W3000241520 hasConcept C119599485 @default.
- W3000241520 hasConcept C127413603 @default.
- W3000241520 hasConcept C131540310 @default.
- W3000241520 hasConcept C133386390 @default.
- W3000241520 hasConcept C139719470 @default.
- W3000241520 hasConcept C147789679 @default.
- W3000241520 hasConcept C162324750 @default.
- W3000241520 hasConcept C165801399 @default.
- W3000241520 hasConcept C17525397 @default.
- W3000241520 hasConcept C185592680 @default.
- W3000241520 hasConcept C192562407 @default.
- W3000241520 hasConcept C206755178 @default.
- W3000241520 hasConcept C2777042071 @default.
- W3000241520 hasConcept C37977207 @default.
- W3000241520 hasConcept C49040817 @default.
- W3000241520 hasConcept C52192207 @default.
- W3000241520 hasConcept C89448510 @default.