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• W3000245115 abstract "We address design, implementation, and characterization of semiconductor strain gauges as stage displacement sensors with small footprint for piezo-driven nanopositioners in differential actuation mode. The results indicate that in this actuation mode, a differential sensing strategy provides much better accuracy than the conventional non-differential schemes. The proposed differential sensor has a large sensitivity of kHz.4.4V/μm, 3σ-resolution of 2.4 nm, and bandwidth of 4 nm, and bandwidth of 4 kHz." @default.
• W3000245115 created "2020-01-23" @default.
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• W3000245115 date "2019-10-01" @default.
• W3000245115 modified "2023-10-18" @default.
• W3000245115 title "In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners" @default.
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• W3000245115 doi "https://doi.org/10.1109/sensors43011.2019.8956836" @default.
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