FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3000723942> ?p ?o ?g. }

• W3000723942 endingPage "337" @default.
• W3000723942 startingPage "337" @default.
• W3000723942 abstract "A miniature piezoresistive pressure sensor fabricated by temporary bonding technology was reported in this paper. The sensing membrane was formed on the device layer of an SOI (Silicon-On-Insulator) wafer, which was bonded to borosilicate glass (Borofloat 33, BF33) wafer for supporting before releasing with Cu-Cu bonding after boron doping and electrode patterning. The handle layer was bonded to another BF33 wafer after thinning and etching. Finally, the substrate BF33 wafer was thinned by chemical mechanical polishing (CMP) to reduce the total device thickness. The copper temporary bonding layer was removed by acid solution after dicing to release the sensing membrane. The chip area of the fabricated pressure sensor was of 1600 μm × 650 μm × 104 μm, and the size of a sensing membrane was of 100 μm × 100 μm × 2 μm. A higher sensitivity of 36 μV/(V∙kPa) in the range of 0–180 kPa was obtained. By further reducing the width, the fabricated miniature pressure sensor could be easily mounted in a medical catheter for the blood pressure measurement." @default.
• W3000723942 created "2020-01-23" @default.
• W3000723942 creator A5001969147 @default.
• W3000723942 creator A5019968053 @default.
• W3000723942 creator A5031616117 @default.
• W3000723942 creator A5040205022 @default.
• W3000723942 creator A5043497286 @default.
• W3000723942 creator A5053761871 @default.
• W3000723942 creator A5061845282 @default.
• W3000723942 date "2020-01-07" @default.
• W3000723942 modified "2023-09-24" @default.
• W3000723942 title "A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology" @default.
• W3000723942 cites W1733315115 @default.
• W3000723942 cites W1971009553 @default.
• W3000723942 cites W1974184470 @default.
• W3000723942 cites W1980783419 @default.
• W3000723942 cites W1989491796 @default.
• W3000723942 cites W2002257666 @default.
• W3000723942 cites W2009290646 @default.
• W3000723942 cites W2035445439 @default.
• W3000723942 cites W2037808705 @default.
• W3000723942 cites W2043236823 @default.
• W3000723942 cites W2051259438 @default.
• W3000723942 cites W2159233708 @default.
• W3000723942 cites W2218397347 @default.
• W3000723942 cites W2296651299 @default.
• W3000723942 cites W2556988293 @default.
• W3000723942 cites W2570000638 @default.
• W3000723942 cites W2609135226 @default.
• W3000723942 cites W2790754523 @default.
• W3000723942 cites W2797588490 @default.
• W3000723942 cites W2908312775 @default.
• W3000723942 doi "https://doi.org/10.3390/s20020337" @default.
• W3000723942 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7013386" @default.
• W3000723942 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/31936069" @default.
• W3000723942 hasPublicationYear "2020" @default.
• W3000723942 type Work @default.
• W3000723942 sameAs 3000723942 @default.
• W3000723942 citedByCount "18" @default.
• W3000723942 countsByYear W30007239422020 @default.
• W3000723942 countsByYear W30007239422021 @default.
• W3000723942 countsByYear W30007239422022 @default.
• W3000723942 countsByYear W30007239422023 @default.
• W3000723942 crossrefType "journal-article" @default.
• W3000723942 hasAuthorship W3000723942A5001969147 @default.
• W3000723942 hasAuthorship W3000723942A5019968053 @default.
• W3000723942 hasAuthorship W3000723942A5031616117 @default.
• W3000723942 hasAuthorship W3000723942A5040205022 @default.
• W3000723942 hasAuthorship W3000723942A5043497286 @default.
• W3000723942 hasAuthorship W3000723942A5053761871 @default.
• W3000723942 hasAuthorship W3000723942A5061845282 @default.
• W3000723942 hasBestOaLocation W30007239421 @default.
• W3000723942 hasConcept C100460472 @default.
• W3000723942 hasConcept C111368507 @default.
• W3000723942 hasConcept C121332964 @default.
• W3000723942 hasConcept C124634506 @default.
• W3000723942 hasConcept C127313418 @default.
• W3000723942 hasConcept C130472188 @default.
• W3000723942 hasConcept C138113353 @default.
• W3000723942 hasConcept C147789679 @default.
• W3000723942 hasConcept C159985019 @default.
• W3000723942 hasConcept C160671074 @default.
• W3000723942 hasConcept C165013422 @default.
• W3000723942 hasConcept C17525397 @default.
• W3000723942 hasConcept C185592680 @default.
• W3000723942 hasConcept C192562407 @default.
• W3000723942 hasConcept C198490522 @default.
• W3000723942 hasConcept C201414436 @default.
• W3000723942 hasConcept C206802598 @default.
• W3000723942 hasConcept C2777289219 @default.
• W3000723942 hasConcept C2779133538 @default.
• W3000723942 hasConcept C2779227376 @default.
• W3000723942 hasConcept C37977207 @default.
• W3000723942 hasConcept C41325743 @default.
• W3000723942 hasConcept C49040817 @default.
• W3000723942 hasConcept C53143962 @default.
• W3000723942 hasConcept C544956773 @default.
• W3000723942 hasConcept C97355855 @default.
• W3000723942 hasConceptScore W3000723942C100460472 @default.
• W3000723942 hasConceptScore W3000723942C111368507 @default.
• W3000723942 hasConceptScore W3000723942C121332964 @default.
• W3000723942 hasConceptScore W3000723942C124634506 @default.
• W3000723942 hasConceptScore W3000723942C127313418 @default.
• W3000723942 hasConceptScore W3000723942C130472188 @default.
• W3000723942 hasConceptScore W3000723942C138113353 @default.
• W3000723942 hasConceptScore W3000723942C147789679 @default.
• W3000723942 hasConceptScore W3000723942C159985019 @default.
• W3000723942 hasConceptScore W3000723942C160671074 @default.
• W3000723942 hasConceptScore W3000723942C165013422 @default.
• W3000723942 hasConceptScore W3000723942C17525397 @default.
• W3000723942 hasConceptScore W3000723942C185592680 @default.
• W3000723942 hasConceptScore W3000723942C192562407 @default.
• W3000723942 hasConceptScore W3000723942C198490522 @default.
• W3000723942 hasConceptScore W3000723942C201414436 @default.
• W3000723942 hasConceptScore W3000723942C206802598 @default.
• W3000723942 hasConceptScore W3000723942C2777289219 @default.
• W3000723942 hasConceptScore W3000723942C2779133538 @default.
• W3000723942 hasConceptScore W3000723942C2779227376 @default.

• next