Matches in SemOpenAlex for { <https://semopenalex.org/work/W3002445103> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W3002445103 abstract "Creation of new dielectric materials for insulating layers of interconnects with low losses at high frequencies (low-k) is one of the main directions of modern microelectronics. Currently, various modifications of standard for modern integrated circuits dielectric structures based on SiO2, differing in composition and morphological characteristics, are being investigated. In this paper, the dielectric losses of thin-film SiO2 samples on an Al substrate are studied by terahertz (THz) and IR spectroscopy. Significant differences in the spectra of such structures in comparison with bulk samples of fused quartz, including berriman resonance modes, were found." @default.
- W3002445103 created "2020-01-30" @default.
- W3002445103 creator A5029705844 @default.
- W3002445103 creator A5032744086 @default.
- W3002445103 creator A5060767743 @default.
- W3002445103 creator A5062651374 @default.
- W3002445103 creator A5073435877 @default.
- W3002445103 creator A5081978050 @default.
- W3002445103 date "2020-01-01" @default.
- W3002445103 modified "2023-10-05" @default.
- W3002445103 title "Диэлектрические потери тонкопленочных образцов SiO-=SUB=-2-=/SUB=- на Al в THz-IR-диапазоне" @default.
- W3002445103 doi "https://doi.org/10.21883/ftt.2020.02.48871.584" @default.
- W3002445103 hasPublicationYear "2020" @default.
- W3002445103 type Work @default.
- W3002445103 sameAs 3002445103 @default.
- W3002445103 citedByCount "0" @default.
- W3002445103 crossrefType "journal-article" @default.
- W3002445103 hasAuthorship W3002445103A5029705844 @default.
- W3002445103 hasAuthorship W3002445103A5032744086 @default.
- W3002445103 hasAuthorship W3002445103A5060767743 @default.
- W3002445103 hasAuthorship W3002445103A5062651374 @default.
- W3002445103 hasAuthorship W3002445103A5073435877 @default.
- W3002445103 hasAuthorship W3002445103A5081978050 @default.
- W3002445103 hasBestOaLocation W30024451031 @default.
- W3002445103 hasConcept C107816215 @default.
- W3002445103 hasConcept C109214941 @default.
- W3002445103 hasConcept C111368507 @default.
- W3002445103 hasConcept C119599485 @default.
- W3002445103 hasConcept C121332964 @default.
- W3002445103 hasConcept C127313418 @default.
- W3002445103 hasConcept C127413603 @default.
- W3002445103 hasConcept C133386390 @default.
- W3002445103 hasConcept C134146338 @default.
- W3002445103 hasConcept C139210041 @default.
- W3002445103 hasConcept C159985019 @default.
- W3002445103 hasConcept C171250308 @default.
- W3002445103 hasConcept C187937830 @default.
- W3002445103 hasConcept C19067145 @default.
- W3002445103 hasConcept C192562407 @default.
- W3002445103 hasConcept C2777289219 @default.
- W3002445103 hasConcept C2779441425 @default.
- W3002445103 hasConcept C2779870107 @default.
- W3002445103 hasConcept C32891209 @default.
- W3002445103 hasConcept C49040817 @default.
- W3002445103 hasConcept C530198007 @default.
- W3002445103 hasConcept C62520636 @default.
- W3002445103 hasConceptScore W3002445103C107816215 @default.
- W3002445103 hasConceptScore W3002445103C109214941 @default.
- W3002445103 hasConceptScore W3002445103C111368507 @default.
- W3002445103 hasConceptScore W3002445103C119599485 @default.
- W3002445103 hasConceptScore W3002445103C121332964 @default.
- W3002445103 hasConceptScore W3002445103C127313418 @default.
- W3002445103 hasConceptScore W3002445103C127413603 @default.
- W3002445103 hasConceptScore W3002445103C133386390 @default.
- W3002445103 hasConceptScore W3002445103C134146338 @default.
- W3002445103 hasConceptScore W3002445103C139210041 @default.
- W3002445103 hasConceptScore W3002445103C159985019 @default.
- W3002445103 hasConceptScore W3002445103C171250308 @default.
- W3002445103 hasConceptScore W3002445103C187937830 @default.
- W3002445103 hasConceptScore W3002445103C19067145 @default.
- W3002445103 hasConceptScore W3002445103C192562407 @default.
- W3002445103 hasConceptScore W3002445103C2777289219 @default.
- W3002445103 hasConceptScore W3002445103C2779441425 @default.
- W3002445103 hasConceptScore W3002445103C2779870107 @default.
- W3002445103 hasConceptScore W3002445103C32891209 @default.
- W3002445103 hasConceptScore W3002445103C49040817 @default.
- W3002445103 hasConceptScore W3002445103C530198007 @default.
- W3002445103 hasConceptScore W3002445103C62520636 @default.
- W3002445103 hasLocation W30024451031 @default.
- W3002445103 hasOpenAccess W3002445103 @default.
- W3002445103 hasPrimaryLocation W30024451031 @default.
- W3002445103 hasRelatedWork W16194939 @default.
- W3002445103 hasRelatedWork W18737707 @default.
- W3002445103 hasRelatedWork W19460108 @default.
- W3002445103 hasRelatedWork W19681689 @default.
- W3002445103 hasRelatedWork W23457341 @default.
- W3002445103 hasRelatedWork W31973659 @default.
- W3002445103 hasRelatedWork W39504178 @default.
- W3002445103 hasRelatedWork W47609885 @default.
- W3002445103 hasRelatedWork W55188888 @default.
- W3002445103 hasRelatedWork W18082726 @default.
- W3002445103 isParatext "false" @default.
- W3002445103 isRetracted "false" @default.
- W3002445103 magId "3002445103" @default.
- W3002445103 workType "article" @default.