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• W3004865391 abstract "In this paper, we discuss different types of cost-effective microelectrodes fabricated with the lithography process. The device with interdigitated electrodes is fabricated using Gold (Au) nanoparticles (NPs) decorated semiconducting single-walled carbon nanotubes (SWNTs). We present the fabrication steps including the metal deposition and etching process to fabricate the electrodes. The electrodes are fabricated on the SiO 2 /Si and glass substrate. The metal film of 200 nm thickness is deposited on the substrate with an electron beam evaporation system. The minimum space between the electrodes is found to be $3 mu mathrm{m}$ . The circular interdigitated metal electrodes have a larger area in comparison to the other types of interdigitated electrodes structures. Further, we fabricate Au NPs decorated SWNT-based devices with interdigitated electrodes. The fabricated devices show a good response to CO 2 gas sensing. The sensor shows a sensitivity of 11% with 6 s response time to CO 2 gas. The recovery time of the sensor is calculated to be 9 s. The devices reported in this work can be used for biosensors and microfluidic channel applications." @default.
• W3004865391 created "2020-02-14" @default.
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• W3004865391 date "2019-11-01" @default.
• W3004865391 modified "2023-09-25" @default.
• W3004865391 title "Fabrication and Characterization of Carbon Nanotube Microdevices for CO2 Gas Sensing and Other Applications" @default.
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• W3004865391 doi "https://doi.org/10.1109/upcon47278.2019.8980140" @default.
• W3004865391 hasPublicationYear "2019" @default.
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