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• W3006735462 abstract "In this study, AlCrN films were deposited from Al70Cr30 alloy targets by high-power impulse magnetron sputtering (HiPIMS). The structural characteristics of the AlCrN films were modulated by performing deposition under various N2/Ar flow ratios. The results indicated that increasing the nitrogen content during deposition leads to corresponding decreases in deposition rate and film thickness, as well as a structural transformation from amorphous to crystalline. A mixture of cubic and hexagonal AlCrN phases was found in the films. Three regions of hardness were observed, and hardness increased with increasing N2/Ar ratio and peaked at 33.6GPa. Good adhesion and wear resistance were observed in all samples." @default.
• W3006735462 created "2020-03-06" @default.
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• W3006735462 date "2020-03-01" @default.
• W3006735462 modified "2023-10-17" @default.
• W3006735462 title "Effects of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlCrN coatings prepared using high power impulse magnetron sputtering" @default.
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• W3006735462 doi "https://doi.org/10.1016/j.surfcoat.2020.125484" @default.
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