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- W3007161609 endingPage "211" @default.
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- W3007161609 abstract "This review summarizes the more-than-25-years of development of the so-called thermionic vacuum arc (TVA). TVA is an anodic arc discharge in vapors of the material to be deposited; the energy for its melting is delivered by means of a focused electron beam. The resulting material ions fall at the substrate where they form a well-adhesive layer; the ion energy is controllable. The deposited layers are, as a rule, free from droplets typical for cathodic arc deposition systems and the thermal stress of the substrates being coated is low. TVA is especially suitable for processing refractory metals, e.g., carbon or tungsten, however, in the course of time, various useful applications of this system originated. They include layers for fusion application, hard coatings, low-friction coatings, biomedical-applicable films, materials for optoelectronics, and for solid-state batteries. Apart from the diagnostic of the film properties, also the diagnostic of the TVA discharge itself as well as of the by TVA generated plasma was performed. The research and application of the TVA proceeds in broad international collaboration. At present, the TVA technology has found its firm place among the different procedures for thin film deposition." @default.
- W3007161609 created "2020-03-06" @default.
- W3007161609 creator A5015242928 @default.
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- W3007161609 creator A5024196591 @default.
- W3007161609 creator A5044107298 @default.
- W3007161609 date "2020-02-27" @default.
- W3007161609 modified "2023-10-16" @default.
- W3007161609 title "Thermionic Vacuum Arc—A Versatile Technology for Thin Film Deposition and Its Applications" @default.
- W3007161609 cites W1062261964 @default.
- W3007161609 cites W1196264366 @default.
- W3007161609 cites W1219939058 @default.
- W3007161609 cites W1529506003 @default.
- W3007161609 cites W1549175294 @default.
- W3007161609 cites W1586230975 @default.
- W3007161609 cites W1835292710 @default.
- W3007161609 cites W1875410931 @default.
- W3007161609 cites W1891380673 @default.
- W3007161609 cites W1917924572 @default.
- W3007161609 cites W1940896773 @default.
- W3007161609 cites W1967095394 @default.
- W3007161609 cites W1968821931 @default.
- W3007161609 cites W1969060747 @default.
- W3007161609 cites W1969640602 @default.
- W3007161609 cites W1971551799 @default.
- W3007161609 cites W1974651346 @default.
- W3007161609 cites W1974708451 @default.
- W3007161609 cites W1975311630 @default.
- W3007161609 cites W1975582732 @default.
- W3007161609 cites W1976079861 @default.
- W3007161609 cites W1977872510 @default.
- W3007161609 cites W1977944703 @default.
- W3007161609 cites W1979281284 @default.
- W3007161609 cites W1980987084 @default.
- W3007161609 cites W1982927082 @default.
- W3007161609 cites W1985500931 @default.
- W3007161609 cites W1986998719 @default.
- W3007161609 cites W1988034718 @default.
- W3007161609 cites W1988133629 @default.
- W3007161609 cites W1990971610 @default.
- W3007161609 cites W1991304833 @default.
- W3007161609 cites W1992020438 @default.
- W3007161609 cites W1993879218 @default.
- W3007161609 cites W1994341779 @default.
- W3007161609 cites W1994601828 @default.
- W3007161609 cites W1995304608 @default.
- W3007161609 cites W1995367299 @default.
- W3007161609 cites W1996481633 @default.
- W3007161609 cites W1999579112 @default.
- W3007161609 cites W2000892489 @default.
- W3007161609 cites W2003604694 @default.
- W3007161609 cites W2005227727 @default.
- W3007161609 cites W2008005964 @default.
- W3007161609 cites W2009355151 @default.
- W3007161609 cites W2011667255 @default.
- W3007161609 cites W2012978704 @default.
- W3007161609 cites W2013565842 @default.
- W3007161609 cites W2013766313 @default.
- W3007161609 cites W2013865184 @default.
- W3007161609 cites W2016646713 @default.
- W3007161609 cites W2018191252 @default.
- W3007161609 cites W2024076002 @default.
- W3007161609 cites W2032028292 @default.
- W3007161609 cites W2032201201 @default.
- W3007161609 cites W2035433006 @default.
- W3007161609 cites W2036241518 @default.
- W3007161609 cites W2036647964 @default.
- W3007161609 cites W2037369736 @default.
- W3007161609 cites W2038747138 @default.
- W3007161609 cites W2039302931 @default.
- W3007161609 cites W2039346230 @default.
- W3007161609 cites W2039496482 @default.
- W3007161609 cites W2041225759 @default.
- W3007161609 cites W2045484331 @default.
- W3007161609 cites W2049754699 @default.
- W3007161609 cites W2050321275 @default.
- W3007161609 cites W2053306339 @default.
- W3007161609 cites W2053533464 @default.
- W3007161609 cites W2053545212 @default.
- W3007161609 cites W2056370679 @default.
- W3007161609 cites W2061370201 @default.
- W3007161609 cites W2061731626 @default.
- W3007161609 cites W2062229911 @default.
- W3007161609 cites W2064355674 @default.
- W3007161609 cites W2067007308 @default.
- W3007161609 cites W2068514191 @default.
- W3007161609 cites W2069513660 @default.
- W3007161609 cites W2070086880 @default.
- W3007161609 cites W2071148730 @default.
- W3007161609 cites W2073472514 @default.
- W3007161609 cites W2075487246 @default.
- W3007161609 cites W2082269831 @default.
- W3007161609 cites W2082838589 @default.
- W3007161609 cites W2083437484 @default.
- W3007161609 cites W2084884124 @default.
- W3007161609 cites W2085903503 @default.
- W3007161609 cites W2088255889 @default.