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• W3007243449 endingPage "109283" @default.
• W3007243449 startingPage "109283" @default.
• W3007243449 abstract "A copper target was negatively-biased and was sputtered by bombardment of argon ion species produced 155 kHz-inductively-coupled plasma (ICP) in a burst-pulse mode for a duration of 800 μs. This system was called ICIS (Inductively-coupled impulse sputtering). The plasma density was on the order of 10 19 m −3 in the ICP region. The target current density and the power density were about 0.8 A/cm 2 and about 0.3 kW/cm 2 , respectively. Temporal evolution of the optical emission of the plasma species was discussed. The observed species were argon ions, excited argon and excited copper. The entire region consisted of the ICP, a bulk plasma and a target plasma. Argon ions produced in the ICP were transported by an ambipolar diffusion toward the target and excited argon and excited copper species were mainly produced in the target plasma. A plateau emission by argon ions and spike emission by energetic electrons which were originated from secondary electrons were seen. Gas rarefaction of argon gas also influenced the temporary evolution particularly near at the target. This was discussed using a carbon target. • Temporal evolution of the optical emission for 155 kHz-ICIS system. • Spike emission following the target plasma production. • Argon ions produced by ICP and excited argon and excited copper produced by target plasma." @default.
• W3007243449 created "2020-03-06" @default.
• W3007243449 creator A5063829543 @default.
• W3007243449 creator A5078236993 @default.
• W3007243449 creator A5091778608 @default.
• W3007243449 date "2020-05-01" @default.
• W3007243449 modified "2023-10-14" @default.
• W3007243449 title "Temporal evolution of spatial optical emission characteristics by inductively-coupled impulse sputtering (ICIS) using high power-burst 155kHz-ICP" @default.
• W3007243449 cites W1480160699 @default.
• W3007243449 cites W1596971376 @default.
• W3007243449 cites W1965487912 @default.
• W3007243449 cites W1967718650 @default.
• W3007243449 cites W1973036143 @default.
• W3007243449 cites W1989457872 @default.
• W3007243449 cites W1991217154 @default.
• W3007243449 cites W1991960272 @default.
• W3007243449 cites W1997954983 @default.
• W3007243449 cites W2002971884 @default.
• W3007243449 cites W2003237814 @default.
• W3007243449 cites W2003682374 @default.
• W3007243449 cites W2010378341 @default.
• W3007243449 cites W2013617201 @default.
• W3007243449 cites W2019800713 @default.
• W3007243449 cites W2021109063 @default.
• W3007243449 cites W2027183061 @default.
• W3007243449 cites W2037840071 @default.
• W3007243449 cites W2044150374 @default.
• W3007243449 cites W2049210955 @default.
• W3007243449 cites W2050535300 @default.
• W3007243449 cites W2065253127 @default.
• W3007243449 cites W2065590950 @default.
• W3007243449 cites W2082556496 @default.
• W3007243449 cites W2084461123 @default.
• W3007243449 cites W2090143331 @default.
• W3007243449 cites W2092118100 @default.
• W3007243449 cites W2094140768 @default.
• W3007243449 cites W2094542584 @default.
• W3007243449 cites W2096277584 @default.
• W3007243449 cites W2129973322 @default.
• W3007243449 cites W2135089014 @default.
• W3007243449 cites W2142748006 @default.
• W3007243449 cites W2155941768 @default.
• W3007243449 cites W2608382697 @default.
• W3007243449 cites W2796615152 @default.
• W3007243449 cites W2894568235 @default.
• W3007243449 doi "https://doi.org/10.1016/j.vacuum.2020.109283" @default.
• W3007243449 hasPublicationYear "2020" @default.
• W3007243449 type Work @default.
• W3007243449 sameAs 3007243449 @default.
• W3007243449 citedByCount "0" @default.
• W3007243449 crossrefType "journal-article" @default.
• W3007243449 hasAuthorship W3007243449A5063829543 @default.
• W3007243449 hasAuthorship W3007243449A5078236993 @default.
• W3007243449 hasAuthorship W3007243449A5091778608 @default.
• W3007243449 hasConcept C113196181 @default.
• W3007243449 hasConcept C121332964 @default.
• W3007243449 hasConcept C145148216 @default.
• W3007243449 hasConcept C171250308 @default.
• W3007243449 hasConcept C178790620 @default.
• W3007243449 hasConcept C181500209 @default.
• W3007243449 hasConcept C184779094 @default.
• W3007243449 hasConcept C185592680 @default.
• W3007243449 hasConcept C19067145 @default.
• W3007243449 hasConcept C192562407 @default.
• W3007243449 hasConcept C196009443 @default.
• W3007243449 hasConcept C22423302 @default.
• W3007243449 hasConcept C25621703 @default.
• W3007243449 hasConcept C43617362 @default.
• W3007243449 hasConcept C544778455 @default.
• W3007243449 hasConcept C547737533 @default.
• W3007243449 hasConcept C61427134 @default.
• W3007243449 hasConcept C62520636 @default.
• W3007243449 hasConcept C82706917 @default.
• W3007243449 hasConcept C95974651 @default.
• W3007243449 hasConcept C97892325 @default.
• W3007243449 hasConceptScore W3007243449C113196181 @default.
• W3007243449 hasConceptScore W3007243449C121332964 @default.
• W3007243449 hasConceptScore W3007243449C145148216 @default.
• W3007243449 hasConceptScore W3007243449C171250308 @default.
• W3007243449 hasConceptScore W3007243449C178790620 @default.
• W3007243449 hasConceptScore W3007243449C181500209 @default.
• W3007243449 hasConceptScore W3007243449C184779094 @default.
• W3007243449 hasConceptScore W3007243449C185592680 @default.
• W3007243449 hasConceptScore W3007243449C19067145 @default.
• W3007243449 hasConceptScore W3007243449C192562407 @default.
• W3007243449 hasConceptScore W3007243449C196009443 @default.
• W3007243449 hasConceptScore W3007243449C22423302 @default.
• W3007243449 hasConceptScore W3007243449C25621703 @default.
• W3007243449 hasConceptScore W3007243449C43617362 @default.
• W3007243449 hasConceptScore W3007243449C544778455 @default.
• W3007243449 hasConceptScore W3007243449C547737533 @default.
• W3007243449 hasConceptScore W3007243449C61427134 @default.
• W3007243449 hasConceptScore W3007243449C62520636 @default.
• W3007243449 hasConceptScore W3007243449C82706917 @default.
• W3007243449 hasConceptScore W3007243449C95974651 @default.
• W3007243449 hasConceptScore W3007243449C97892325 @default.
• W3007243449 hasLocation W30072434491 @default.
• W3007243449 hasOpenAccess W3007243449 @default.

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