Matches in SemOpenAlex for { <https://semopenalex.org/work/W3007279777> ?p ?o ?g. }
- W3007279777 endingPage "879" @default.
- W3007279777 startingPage "869" @default.
- W3007279777 abstract "High aspect ratio nanostructuring requires high precision pattern transfer with highly directional etching. In this work, we demonstrate the fabrication of structures with ultra-high aspect ratios (up to 10 000 : 1) in the nanoscale regime (down to 10 nm) by platinum assisted chemical etching of silicon in the gas phase. The etching gas is created by a vapour of water diluted hydrofluoric acid and a continuous air flow, which works both as an oxidizer and as a gas carrier for reactive species. The high reactivity of platinum as a catalyst and the formation of platinum silicide to improve the stability of the catalyst pattern allow a controlled etching. The method has been successfully applied to produce straight nanowires with section size in the range of 10-100 nm and length of hundreds of micrometres, and X-ray optical elements with feature sizes down to 10 nm and etching depth in the range of tens of micrometres. This work opens the possibility of a low cost etching method for stiction-sensitive nanostructures and a large range of applications where silicon high aspect ratio nanostructures and high precision of pattern transfer are required." @default.
- W3007279777 created "2020-03-06" @default.
- W3007279777 creator A5002647826 @default.
- W3007279777 creator A5006399818 @default.
- W3007279777 creator A5032916629 @default.
- W3007279777 creator A5060294660 @default.
- W3007279777 creator A5069421942 @default.
- W3007279777 creator A5080333127 @default.
- W3007279777 creator A5090410721 @default.
- W3007279777 date "2020-01-01" @default.
- W3007279777 modified "2023-10-16" @default.
- W3007279777 title "Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics" @default.
- W3007279777 cites W1571363314 @default.
- W3007279777 cites W1581110272 @default.
- W3007279777 cites W1622645825 @default.
- W3007279777 cites W1636543212 @default.
- W3007279777 cites W1975935377 @default.
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- W3007279777 cites W2003618369 @default.
- W3007279777 cites W2015488136 @default.
- W3007279777 cites W2015533114 @default.
- W3007279777 cites W2015893802 @default.
- W3007279777 cites W2017167386 @default.
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- W3007279777 cites W2037152301 @default.
- W3007279777 cites W2045539736 @default.
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- W3007279777 cites W2054167314 @default.
- W3007279777 cites W2054694108 @default.
- W3007279777 cites W2068678894 @default.
- W3007279777 cites W2077987673 @default.
- W3007279777 cites W2078636870 @default.
- W3007279777 cites W2089005749 @default.
- W3007279777 cites W2092018938 @default.
- W3007279777 cites W2107449292 @default.
- W3007279777 cites W2107455356 @default.
- W3007279777 cites W2122176956 @default.
- W3007279777 cites W2132622560 @default.
- W3007279777 cites W2135046531 @default.
- W3007279777 cites W2136269858 @default.
- W3007279777 cites W2138744901 @default.
- W3007279777 cites W2139378461 @default.
- W3007279777 cites W2149789246 @default.
- W3007279777 cites W2151968912 @default.
- W3007279777 cites W2157235981 @default.
- W3007279777 cites W2157950330 @default.
- W3007279777 cites W2160553708 @default.
- W3007279777 cites W2170301822 @default.
- W3007279777 cites W2172202709 @default.
- W3007279777 cites W2312279714 @default.
- W3007279777 cites W2313114179 @default.
- W3007279777 cites W2313484605 @default.
- W3007279777 cites W2316563121 @default.
- W3007279777 cites W2321240046 @default.
- W3007279777 cites W2328221192 @default.
- W3007279777 cites W2328806077 @default.
- W3007279777 cites W2335181814 @default.
- W3007279777 cites W2340717854 @default.
- W3007279777 cites W2343410824 @default.
- W3007279777 cites W2414814162 @default.
- W3007279777 cites W2490640095 @default.
- W3007279777 cites W2555987902 @default.
- W3007279777 cites W2568147717 @default.
- W3007279777 cites W2587092028 @default.
- W3007279777 cites W2592756335 @default.
- W3007279777 cites W2623680914 @default.
- W3007279777 cites W2624817045 @default.
- W3007279777 cites W2767514169 @default.
- W3007279777 cites W2791350036 @default.
- W3007279777 cites W2795636025 @default.
- W3007279777 cites W2800379630 @default.
- W3007279777 cites W2889292049 @default.
- W3007279777 cites W2893622942 @default.
- W3007279777 cites W2897798547 @default.
- W3007279777 cites W2905138849 @default.
- W3007279777 cites W2914400900 @default.
- W3007279777 cites W2935880888 @default.
- W3007279777 cites W2986665045 @default.
- W3007279777 cites W4246325717 @default.
- W3007279777 doi "https://doi.org/10.1039/c9nh00709a" @default.
- W3007279777 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/32100775" @default.
- W3007279777 hasPublicationYear "2020" @default.
- W3007279777 type Work @default.
- W3007279777 sameAs 3007279777 @default.
- W3007279777 citedByCount "44" @default.
- W3007279777 countsByYear W30072797772020 @default.
- W3007279777 countsByYear W30072797772021 @default.
- W3007279777 countsByYear W30072797772022 @default.
- W3007279777 countsByYear W30072797772023 @default.
- W3007279777 crossrefType "journal-article" @default.
- W3007279777 hasAuthorship W3007279777A5002647826 @default.
- W3007279777 hasAuthorship W3007279777A5006399818 @default.