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Matches in SemOpenAlex for { <https://semopenalex.org/work/W3009420004> ?p ?o ?g. }

• W3009420004 abstract "We have demonstrated a large-area metasurface beam deflector array patterned directly on a 12-inch glass wafer using immersion lithography. The captured random points at 940 nm wavelength show a good match with the design." @default.
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• W3009420004 date "2020-01-01" @default.
• W3009420004 modified "2023-09-26" @default.
• W3009420004 title "Metasurface Beam Deflector Array on a 12-inch Glass Wafer" @default.
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• W3009420004 doi "https://doi.org/10.1364/ofc.2020.w2a.9" @default.
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