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• W3009597978 abstract "Over the past two decades, prototype devices for future classical and quantum computing technologies have been fabricated by using scanning tunneling microscopy and hydrogen resist lithography to position phosphorus atoms in silicon with atomic-scale precision. Despite these successes, phosphine remains the only donor precursor molecule to have been demonstrated as compatible with the hydrogen resist lithography technique. The potential benefits of atomic-scale placement of alternative dopant species have, until now, remained unexplored. In this work, we demonstrate the successful fabrication of atomic-scale structures of arsenic-in-silicon. Using a scanning tunneling microscope tip, we pattern a monolayer hydrogen mask to selectively place arsenic atoms on the Si(001) surface using arsine as the precursor molecule. We fully elucidate the surface chemistry and reaction pathways of arsine on Si(001), revealing significant differences to phosphine. We explain how these differences result in enhanced surface immobilization and in-plane confinement of arsenic compared to phosphorus, and a dose-rate independent arsenic saturation density of 0.24 ± 0.04 monolayers. We demonstrate the successful encapsulation of arsenic delta-layers using silicon molecular beam epitaxy, and find electrical characteristics that are competitive with equivalent structures fabricated with phosphorus. Arsenic delta-layers are also found to offer confinement as good as similarly prepared phosphorus layers, while still retaining >80% carrier activation and sheet resistances of <2 kΩ/square. These excellent characteristics of arsenic represent opportunities to enhance existing capabilities of atomic-scale fabrication of dopant structures in silicon, and may be important for three-dimensional devices, where vertical control of the position of device components is critical." @default.
• W3009597978 created "2020-03-13" @default.
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• W3009597978 date "2020-03-06" @default.
• W3009597978 modified "2023-10-12" @default.
• W3009597978 title "Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy" @default.
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• W3009597978 cites W1647205744 @default.
• W3009597978 cites W1970355234 @default.
• W3009597978 cites W1973609935 @default.
• W3009597978 cites W1977022136 @default.
• W3009597978 cites W1977487692 @default.
• W3009597978 cites W1978484424 @default.
• W3009597978 cites W1979486718 @default.
• W3009597978 cites W1981338907 @default.
• W3009597978 cites W1986786625 @default.
• W3009597978 cites W1989416179 @default.
• W3009597978 cites W1994203029 @default.
• W3009597978 cites W1994807663 @default.
• W3009597978 cites W1995642704 @default.
• W3009597978 cites W1998545905 @default.
• W3009597978 cites W2009870510 @default.
• W3009597978 cites W2011050739 @default.
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• W3009597978 cites W2017503766 @default.
• W3009597978 cites W2021818886 @default.
• W3009597978 cites W2033013230 @default.
• W3009597978 cites W2039822714 @default.
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• W3009597978 cites W2061074141 @default.
• W3009597978 cites W2063981633 @default.
• W3009597978 cites W2068631415 @default.
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• W3009597978 cites W2074406135 @default.
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• W3009597978 cites W2092832564 @default.
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• W3009597978 cites W2134220584 @default.
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• W3009597978 doi "https://doi.org/10.1021/acsnano.9b08943" @default.
• W3009597978 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7146850" @default.
• W3009597978 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/32142256" @default.
• W3009597978 hasPublicationYear "2020" @default.
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