Matches in SemOpenAlex for { <https://semopenalex.org/work/W3009940309> ?p ?o ?g. }
- W3009940309 endingPage "042601" @default.
- W3009940309 startingPage "042601" @default.
- W3009940309 abstract "Abstract Aluminum nitride (AlN) has attracted a great amount of interest due to the fact that these group III–V semiconductors present direct band gap behavior and are compatible with current micro-electro-mechanical systems. In this work, three dimensional (3D) AlN architectures including tubes and helices were constructed by rolling up AlN nanomembranes grown on a silicon-on-insulator wafer via magnetron sputtering. The properties of the AlN membrane were characterized through transmission electron microscopy and X-ray diffraction. The thickness of AlN nanomembranes could be tuned via the RIE thinning method, and thus micro-tubes with different diameters were fabricated. The intrinsic strain in AlN membranes was investigated via micro-Raman spectroscopy, which agrees well with theory prediction. Whispering gallery mode was observed in AlN tubular optical microcavity in photoluminescence spectrum. A postprocess involving atomic layer deposition and R6G immersion were employed on as-fabricated AlN tubes to promote the Q -factor. The AlN tubular micro-resonators could offer a novel design route for Si-based integrated light sources. In addition, the rolled-up technology paves a new way for AlN 3D structure fabrication, which is promising for AlN application in MEMS and photonics fields." @default.
- W3009940309 created "2020-03-13" @default.
- W3009940309 creator A5000284357 @default.
- W3009940309 creator A5008218806 @default.
- W3009940309 creator A5017858753 @default.
- W3009940309 creator A5021348954 @default.
- W3009940309 creator A5029484872 @default.
- W3009940309 creator A5044859916 @default.
- W3009940309 date "2020-04-01" @default.
- W3009940309 modified "2023-09-26" @default.
- W3009940309 title "Tubular/helical architecture construction based on rolled-up AlN nanomembranes and resonance as optical microcavity" @default.
- W3009940309 cites W1976055776 @default.
- W3009940309 cites W1981541269 @default.
- W3009940309 cites W1989029612 @default.
- W3009940309 cites W1989580288 @default.
- W3009940309 cites W1996578005 @default.
- W3009940309 cites W2000252514 @default.
- W3009940309 cites W2006271366 @default.
- W3009940309 cites W2014398400 @default.
- W3009940309 cites W2021845484 @default.
- W3009940309 cites W2022228446 @default.
- W3009940309 cites W2032712377 @default.
- W3009940309 cites W2055706390 @default.
- W3009940309 cites W2066061312 @default.
- W3009940309 cites W2072070270 @default.
- W3009940309 cites W2083611773 @default.
- W3009940309 cites W2085840193 @default.
- W3009940309 cites W2088564244 @default.
- W3009940309 cites W2113813862 @default.
- W3009940309 cites W2128089751 @default.
- W3009940309 cites W2135655679 @default.
- W3009940309 cites W2137994259 @default.
- W3009940309 cites W2171376220 @default.
- W3009940309 cites W2292995441 @default.
- W3009940309 cites W2460854727 @default.
- W3009940309 cites W2587595630 @default.
- W3009940309 cites W2593746834 @default.
- W3009940309 cites W2738917731 @default.
- W3009940309 cites W2742696436 @default.
- W3009940309 cites W2782406381 @default.
- W3009940309 cites W2783623914 @default.
- W3009940309 cites W2919195726 @default.
- W3009940309 doi "https://doi.org/10.1088/1674-4926/41/4/042601" @default.
- W3009940309 hasPublicationYear "2020" @default.
- W3009940309 type Work @default.
- W3009940309 sameAs 3009940309 @default.
- W3009940309 citedByCount "7" @default.
- W3009940309 countsByYear W30099403092020 @default.
- W3009940309 countsByYear W30099403092022 @default.
- W3009940309 countsByYear W30099403092023 @default.
- W3009940309 crossrefType "journal-article" @default.
- W3009940309 hasAuthorship W3009940309A5000284357 @default.
- W3009940309 hasAuthorship W3009940309A5008218806 @default.
- W3009940309 hasAuthorship W3009940309A5017858753 @default.
- W3009940309 hasAuthorship W3009940309A5021348954 @default.
- W3009940309 hasAuthorship W3009940309A5029484872 @default.
- W3009940309 hasAuthorship W3009940309A5044859916 @default.
- W3009940309 hasConcept C120665830 @default.
- W3009940309 hasConcept C121332964 @default.
- W3009940309 hasConcept C136525101 @default.
- W3009940309 hasConcept C142724271 @default.
- W3009940309 hasConcept C160671074 @default.
- W3009940309 hasConcept C171250308 @default.
- W3009940309 hasConcept C19067145 @default.
- W3009940309 hasConcept C192562407 @default.
- W3009940309 hasConcept C194760766 @default.
- W3009940309 hasConcept C204787440 @default.
- W3009940309 hasConcept C20788544 @default.
- W3009940309 hasConcept C22423302 @default.
- W3009940309 hasConcept C2779227376 @default.
- W3009940309 hasConcept C40003534 @default.
- W3009940309 hasConcept C49040817 @default.
- W3009940309 hasConcept C544956773 @default.
- W3009940309 hasConcept C61427134 @default.
- W3009940309 hasConcept C71924100 @default.
- W3009940309 hasConcept C77255779 @default.
- W3009940309 hasConcept C85080765 @default.
- W3009940309 hasConcept C97126364 @default.
- W3009940309 hasConceptScore W3009940309C120665830 @default.
- W3009940309 hasConceptScore W3009940309C121332964 @default.
- W3009940309 hasConceptScore W3009940309C136525101 @default.
- W3009940309 hasConceptScore W3009940309C142724271 @default.
- W3009940309 hasConceptScore W3009940309C160671074 @default.
- W3009940309 hasConceptScore W3009940309C171250308 @default.
- W3009940309 hasConceptScore W3009940309C19067145 @default.
- W3009940309 hasConceptScore W3009940309C192562407 @default.
- W3009940309 hasConceptScore W3009940309C194760766 @default.
- W3009940309 hasConceptScore W3009940309C204787440 @default.
- W3009940309 hasConceptScore W3009940309C20788544 @default.
- W3009940309 hasConceptScore W3009940309C22423302 @default.
- W3009940309 hasConceptScore W3009940309C2779227376 @default.
- W3009940309 hasConceptScore W3009940309C40003534 @default.
- W3009940309 hasConceptScore W3009940309C49040817 @default.
- W3009940309 hasConceptScore W3009940309C544956773 @default.
- W3009940309 hasConceptScore W3009940309C61427134 @default.
- W3009940309 hasConceptScore W3009940309C71924100 @default.
- W3009940309 hasConceptScore W3009940309C77255779 @default.
- W3009940309 hasConceptScore W3009940309C85080765 @default.