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- W3010234499 abstract "In the paper the modeling results for the process of MOEMS functional surfaces shaping are presented. The significance and magnitude of factors that directly affect the shaping process of MOEMS functional surfaces were determined." @default.
- W3010234499 created "2020-03-13" @default.
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- W3010234499 date "2019-09-01" @default.
- W3010234499 modified "2023-09-27" @default.
- W3010234499 title "Impact of Technological Operations Parameters on Moems Components Formation" @default.
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- W3010234499 doi "https://doi.org/10.1109/caol46282.2019.9019570" @default.
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